Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014 2014
DOI: 10.1117/12.2047314
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Ultrasonic guided wave sensing properties of PVDF thin film with inter digital electrodes

Abstract: Ultrasonic strain sensing performance of the large area PVDF with Inter Digital Electrodes (IDE) is studied in this work. Procedure to obtain IDE on a beta-phase PVDF is explained. PVDF film with IDE is bonded on a plate structure and is characterized for its directional sensitivity at different frequencies. Guided waves are induced on the IDE-PVDF sensor from different directions by placing a piezoelectric wafer actuator at different angles. Strain induced on the IDE-PVDF sensor by the guided waves in estimat… Show more

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Cited by 3 publications
(1 citation statement)
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“…As thin films ranging from few micrometers to nanometers, they have seen growing use in applications such as force microscopy [ 15 ], nano-positioning [ 16 ], micromechanical systems (MEMS) [ 17 , 18 , 19 ] and nanoelectromechanical systems (NEMS) [ 20 , 21 ], energy harvesters [ 22 , 23 ], etc. Some well-known applications of thin films are MEMS microphone [ 24 ], headphone [ 24 ], loudspeaker [ 24 , 25 , 26 ], acoustic emission sensor [ 27 , 28 ], vibration sensor [ 10 , 14 ], inertial sensor [ 19 ], tactile sensors [ 29 , 30 , 31 ], power harvesting [ 32 , 33 ], ultrasound transducers [ 34 , 35 , 36 , 37 , 38 ], and guided wave sensors [ 39 , 40 , 41 ]. Thin films are preferably made of nontoxic piezopolymers or piezocomposites.…”
Section: Introductionmentioning
confidence: 99%
“…As thin films ranging from few micrometers to nanometers, they have seen growing use in applications such as force microscopy [ 15 ], nano-positioning [ 16 ], micromechanical systems (MEMS) [ 17 , 18 , 19 ] and nanoelectromechanical systems (NEMS) [ 20 , 21 ], energy harvesters [ 22 , 23 ], etc. Some well-known applications of thin films are MEMS microphone [ 24 ], headphone [ 24 ], loudspeaker [ 24 , 25 , 26 ], acoustic emission sensor [ 27 , 28 ], vibration sensor [ 10 , 14 ], inertial sensor [ 19 ], tactile sensors [ 29 , 30 , 31 ], power harvesting [ 32 , 33 ], ultrasound transducers [ 34 , 35 , 36 , 37 , 38 ], and guided wave sensors [ 39 , 40 , 41 ]. Thin films are preferably made of nontoxic piezopolymers or piezocomposites.…”
Section: Introductionmentioning
confidence: 99%