Ultraprecision micro-CMM using a low force 3D touch probe

Küng, Alain; Meli, Felix; Thalmann, R.

doi:10.1088/0957-0233/18/2/s01

Cited by 188 publications

(122 citation statements)

References 4 publications

(4 reference statements)

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“…La machine de la figure 22 est installée au METAS, le laboratoire national suisse. La structure est intéressante puisque la pièce est installée sur un ensemble constituée de 3 plans orthogonaux deux à deux sur lesquels on fait de l'interférométrie sur miroir plan avec les faisceaux dans le prolongement de la bille du palpeur ce qui permet de respecter le principe d'Abbe dans les trois directions [18]. Cette microCMM n'est pas la seule sur le marché.…”

Section: Microcmmunclassified

Typologie et conception des machines à mesurer tridimensionnelles : un état de l’art

Coorevits¹,

Hennebelle²

2015

17th International Congress of Metrology

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Abstract. This article is limited to coordinate measuring machines CNC ordered without addressing probing systems, measuring arms or optical techniques. We present an inventory of major architectures based on the standard ISO10360-1. Then, the key points of the design of coordinate measuring machines are studied. These key points are related to the design of the slideways, the Abbe principle introduced by Ernst Abbe in the late nineteenth which remains a fundamental point, the position of drives and materials. The geometry correction software becomes essential in the mid-1980s. We recall the basic ideas and confronts lapping practiced previously. Finally, we give some leads on trends in the design of CMM related to the introduction of sensors, the emergence of "microCMM" or three-dimensional comparator. This is to provide in a few pages, a panorama of the state of the main knowledge in terms of design and product evolution.

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Section: Microcmmunclassified

Typologie et conception des machines à mesurer tridimensionnelles : un état de l’art

Coorevits¹,

Hennebelle²

2015

17th International Congress of Metrology

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“…To offer the highly accurate full 3D metrological capability of microparts, a generation of micro-coordinate measuring machines (micro-CMMs) has been developed in the last two decades [4][5][6][7][8][9][10][11][12][13][14]. The first micro-CMM was developed by Peggs et al [4] at the National Physical Laboratory of the United Kingdom in the year 1999.…”

Section: Introductionmentioning

confidence: 99%

“…Various micro-CMM probes have also been developed [4,11,[15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30]. Most of them are mechanical tactile probes working in the contact mode [4,11,[15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

et al. 2016

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Improved metrological capabilities for three-dimensional (3D) measurements of various complex micro-and nanoparts are increasingly in demand. This paper gives an overview of the research activities carried out by the Physikalisch-Technische Bundesanstalt (PTB), the national metrology institute of Germany, to meet this demand. Examples of recent research advances in the development of instrumentation and calibration standards are presented. An ultra-precision nanopositioning and nanomeasuring machine (NMM) has been upgraded with regard to its mirror corner, interferometers and angle sensors, as well as its weight compensation, its electronic controller, its vibration damping stage and its instrument chamber. Its positioning noise has been greatly reduced, e.g., from 1σ = 0.52 nm to 1σ = 0.13 nm for the z-axis. The well-known tactile-optical fibre probe has been further improved with regard to its 3D measurement capability, isotropic probing stiffness and dual-sphere probing styli. A 3D atomic force microscope (AFM) and assembled cantilever probes (ACPs) have been developed which allow full 3D measurements of smaller features with sizes from a few micrometres down to tens of nanometres. In addition, several measurement standards for force, geometry, contour and microgear measurements have been introduced. A type of geometry calibration artefact, referred to as the "3D Aztec artefact", has been developed which applies wet-etched micro-pyramidal marks for defining reference coordinates in 3D space. Compared to conventional calibration artefacts, it has advantages such as a good surface quality, a well-defined geometry and cost-effective manufacturing. A task-specific micro-contour calibration standard has been further developed for ensuring the traceability of, e.g., high-precision optical measurements at microgeometries. A workpiece-like microgear standard embodying different gear geometries (modules ranging from 0.1 mm to 1 mm) has also been developed at the Physikalisch-Technische Bundesanstalt.

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“…(1)(2)(3)(4)(5)(6) It was proved that the error will increase to 10 mm owing to the thermal deformation of the system's mechanical structure if the environment temperature varied 1 °C. (7) Usually, most precision laboratories construct expensive and spacious constant-temperature rooms to enclose all equipment and operators.…”

Section: Introductionmentioning

confidence: 99%

“…(13) Many other research institutes have studied the temperature-controlled environment for nanotechnology application. (2)(3)(4)(5)(6) The above-mentioned chambers have high precision and high stability. However, they are very complicated, expensive, and difficult to manufacture.…”

Section: Introductionmentioning

confidence: 99%

Development of a Low-Cost and Vibration-Free Constant-Temperature Chamber for Precision Measurement

Feng¹,

Fan³

et al. 2015

Sensors and Materials

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A low-cost high-precision constant-temperature mini chamber based on the natural convection principle is presented in this paper. The chamber is assembled using hollow acrylic walls whose sizes are tailored according to the required space. A thin layer of vacuum insulation plate (VIP) with an ultralow thermal conductivity coefficient is adhered around the inner walls so as to prevent heat exchange with room air. A highprecision temperature sensor measuring the temperature near the instrument's measuring point provides a feedback signal to a proportional integral derivative (PID) controller. Thermoelectric coolers uniformly arranged on the ceiling of the chamber are used to cool the air inside the chamber directly without any air supply system, yielding a vibrationfree cooling system. A programmable power supply is used as the driver for the coolers to generate different cooling capacities. In practice, the down-flowing cool air and the up-flowing hot air form a natural convection, and the air temperature in the chamber gradually becomes stable and finally reaches the temperature set by the PID controller. Experimental results show that the system's steady-state error is 0.0043 °C on average, and the variation range is less than ±0.02 °C when the set temperature is 20 °C, which is much better than the requirement of a Class I standard room. This innovative low-cost, vibration-free, and low-energy-consumption temperature-controlled chamber can be used in micro/nanomeasurement or manufacturing applications and its volume can be customdesigned for any equipment.

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Ultraprecision micro-CMM using a low force 3D touch probe

Cited by 188 publications

References 4 publications

Typologie et conception des machines à mesurer tridimensionnelles : un état de l’art

Typologie et conception des machines à mesurer tridimensionnelles : un état de l’art

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

Development of a Low-Cost and Vibration-Free Constant-Temperature Chamber for Precision Measurement

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