Ultrahigh superelastic damping at the nano-scale: A robust phenomenon to improve smart MEMS devices

Gómez-Cortés, J.F.; Nó, M.L.; Ruiz‐Larrea, I.; Bréczewski, T.; López‐Echarri, A.; Schuh, Christopher A.; Juan, J. San

doi:10.1016/j.actamat.2018.12.043

Cited by 34 publications

(19 citation statements)

References 47 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Indeed, a fully closed superelastic cycle is observed, except for a residual depth of about 2–3 nm, observed after the recovery of the first cycle, see Figure 1f, which could be associated with the flattening of the top surface pillar's roughness beneath the indenter, because the second cycle becomes fully closed even at this scale. The critical load to induce the martensitic transformation undergoes a decrease during the first few cycles due to a training effect already reported in other SMAs …”

Section: Resultsmentioning

confidence: 74%

“…d-f) Load-displacement curves, measured by nanocompression tests, illustrating the superelastic behavior of the pillars on the left, respectively. [20,21,26] From the load-displacement curves, and using the measured height and diameter of each pillar, the stress-strain curves shown in Figure 1g-i are easily obtained. g-i) Stress-strain cycles obtained from the previous load-displacement curves, respectively.…”

Section: Superelasticity At the Nanoscalementioning

confidence: 99%

“…Among different families of SMAs, Ti‐Ni is the most wide‐spread SMA but shows a loss of reversibility during superelastic effect at small scale, while, on the contrary, Cu‐Al‐Ni SMAs exhibit a good reproducible superelastic behavior at the nanoscale, even after long‐term cycling . However, until now, Cu‐Al‐Ni has been the only Cu‐based SMA family tested for superelasticity at nanoscale, and in order to explore new SMA families, Cu‐Al‐Be becomes a very attractive family because at macroscopic scale, it exhibits a longer functional (superelastic) fatigue life than the Cu‐Al‐Ni family…”

Section: Introductionmentioning

confidence: 99%

“…[15] Thanks to the superelastic behavior, [13] network-shaped devices designed with SMAs will be dramatically stretchable and their superelastic functionality could exceed 10 7 cycles, [16] withstanding stresses above 100 MPa even at small scale. [20,21] However, until now, Cu-Al-Ni has been the only Cu-based SMA family tested for superelasticity at nanoscale, [17,18,[20][21][22] and in order to explore new SMA families, Cu-Al-Be becomes a very attractive family because at macroscopic scale, it exhibits a longer functional (superelastic) fatigue life than the Cu-Al-Ni family. [20,21] However, until now, Cu-Al-Ni has been the only Cu-based SMA family tested for superelasticity at nanoscale, [17,18,[20][21][22] and in order to explore new SMA families, Cu-Al-Be becomes a very attractive family because at macroscopic scale, it exhibits a longer functional (superelastic) fatigue life than the Cu-Al-Ni family.…”

mentioning

confidence: 99%

See 3 more Smart Citations

Universal Scaling Law for the Size Effect on Superelasticity at the Nanoscale Promotes the Use of Shape‐Memory Alloys in Stretchable Devices

Fuster

Gómez-Cortés

Nó

et al. 2019

Adv Elect Materials

Self Cite

View full text Add to dashboard Cite

stretchable materials for wearable electronics, [1,2] including a diversity of materials such as flexible semiconductors, [3] or flexible meta-materials, [4] for instance, giving place to a plethora of unforeseen applications. [5] New advances in small-scale soft robots, [6] and particularly in stretchable electronic skin, [7] are driving new fields like functional neural interfaces, [8] and implantable bioelectronics. [9] With a growing worldwide forecast market, which will exceed 200 billion dollars per year by 2027, [10] flexible and stretchable electronic and wearable technologies constitute a new paradigm in the materials science era. Most of these technologies rely on organic materials, [2,11] including shape memory polymers. [12] Nevertheless, in a recent road map in this field, [8] the key points for electrical connectors or electrode materials were well identified: exceptional electrical conductivity, high stretchability, long-term functionality, the ability to withstand high stresses, and the capability of working with low cross-sectional area. While polymers and metals currently used in flexible technologies exhibit several drawbacks (for instance low electrical conductivity in polymers and low stretching capabilities in metals), shape memory alloys (SMAs), [13] could fulfill all the above requirements. Indeed, Cu-based SMAs have an extremely high electrical conductivity, 10 7 S m −1 , [14] close to pure copper and silver (6 × 10 7 S m −1 ). [15] Thanks to the superelastic behavior, [13] network-shaped devices designed with SMAs will be dramatically stretchable and their superelastic functionality could exceed 10 7 cycles, [16] withstanding stresses above 100 MPa even at small scale. [17,18] Then, SMAs could be excellent candidates to be used as electrical connectors in flexible electronic devices, provided that the last requirement could be fulfilled, this means that the above properties would be exhibited in a very low cross-sectional area, down to 1 µm 2 section or even less.Among different families of SMAs, Ti-Ni is the most widespread SMA but shows a loss of reversibility during superelastic effect at small scale, [19] while, on the contrary, Cu-Al-Ni SMAs exhibit a good reproducible superelastic behavior at the nanoscale, [17,18] even after long-term cycling. [20,21] However, until now, Cu-Al-Ni has been the only Cu-based SMA family tested for superelasticity at nanoscale, [17,18,[20][21][22] and in order to explore new SMA families, Cu-Al-Be becomes a very attractive family because at macroscopic scale, it exhibits a longer functional (superelastic) fatigue life than the Cu-Al-Ni family. [23] Shape-memory alloys (SMAs) are the most stretchable metallic materials thanks to their superelastic behavior associated with the stress-induced martensitic transformation. This property makes SMAs of potential interest for flexible and wearable electronic technologies, provided that their properties will be retained at small scale. Nanocompression experiments on Cu-Al-Be SMA single crystals demonstrate...

show abstract

Section: Resultsmentioning

confidence: 74%

Section: Superelasticity At the Nanoscalementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

See 2 more Smart Citations

Universal Scaling Law for the Size Effect on Superelasticity at the Nanoscale Promotes the Use of Shape‐Memory Alloys in Stretchable Devices

Fuster

Gómez-Cortés

Nó

et al. 2019

Adv Elect Materials

Self Cite

View full text Add to dashboard Cite

show abstract

“…Bu cihazların üretim sürecinde yüzey mikro işlemeyi ve entegre devre ile uyumlu yığın mikro işlemeyi içeren yarı iletken teknolojisi kullanılmaktadır [4,5]. Günümüzde MEMS teknolojisi, otomotiv, biyoteknoloji, askeri ve endüstriyel otomasyon gibi birçok çalışma alanının önemli bir parçasıdır [6][7][8]. MEMS teknolojisinin işlevsel temel öğeleri minyatür yapılar, sensörler, aktüatörler ve mikro elektronik yapılar iken, en dikkat çekici bileşenler mikro-sensörler ve mikro-aktüatörlerdir [9][10][11].…”

Section: Gi̇ri̇ş (Introduction)unclassified

Görüntü işleme algoritması kullanarak elektrotermal mikro-aktüatörün karakterizasyonu

Ülkir¹

2021

Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi

View full text Add to dashboard Cite

 Fabrication of microactuator  Fabrication with digital light processing  Characterization of the electrothermal microactuator In this study, the characterization of the electrothermal micro-actuator fabricated using digital light processing, which is one of the 3D fabrication methods, was realized using the image processing algorithm. For this aim, three different experiments were conducted during the fabrication process. During the fabrication process of the first two experiments, deterioration or breakage occurred in the micro-actuator structure. These problems did not occur in the fabrication of the 3rd experiment. Characterization process was done with the microactuator fabricated as a result of experiment 3. Based on the experimental results, the fabrication and displacement of the micro-actuator is carried out successfully. Figure A. Fabrication of electrothermal micro-actuator a) fabrication as a result of experiment 1 b) fabrication as a result of experiment 2, fabrication as a result of experiment 3 Purpose: This work aims to fabricate electrothermal micro-actuator with digital light processing method and characterize it with image processing algorithm. Theory and Methods: This work consists of three main phases, namely, design, fabrication and characterization. Results: It has been observed that the support structures used on the micro-actuator have a great influence on the 3D fabrication process. In the characterization process, when a voltage higher than 6V is applied to the micro actuator, it was observed that breakages or deteriorations occurred in its structure. Conclusion: It is concluded that the support structures are very important in the fabrication process of the micro-actuator using 3D fabrication technique. On the other hand, in the characterization process, it has been determined that the displacement of the micro-actuator is directly proportional to the applied voltage, but its structure is distorted after a point. As a result of experimental studies, the maximum displacement was measured as 3.84 µm at 6V voltage. As the actuator design is bidirectional, the maximum displacement of the micro-actuator was determined to be 7.68 µm.

show abstract

Microstructure of Stress‐Induced Martensite in Micron‐Sized Zirconia Single Crystal Spheres

Dhariwal,

2024

Adv Eng Mater

View full text Add to dashboard Cite

Martensitic phase transformation of zirconia (ZrO2), when realized from the superelastic effect, has immense potential in energy applications, such as micro‐actuation and high‐energy dissipation/damping. In this study, martensitic transformation in ZrO2 is studied using a newly developed microscale phase field model, which is scale‐independent and contains an averaged gradient term. The model is implemented using the FEniCS package in Python. With a thorough explanation of the model construction, the mechanics of phase transformation are detailed, and the material behaviors under different stress conditions are discussed. Mesh sensitivity, multivariant evolution, and the effect of particle size are analyzed to understand the martensite evolution in superelastic ZrO2. This work provides new insight into the martensitic phase transformation behaviors of micron‐sized spherical ZrO2 particles.This article is protected by copyright. All rights reserved.

show abstract

Ultrahigh superelastic damping at the nano-scale: A robust phenomenon to improve smart MEMS devices

Cited by 34 publications

References 47 publications

Universal Scaling Law for the Size Effect on Superelasticity at the Nanoscale Promotes the Use of Shape‐Memory Alloys in Stretchable Devices

Universal Scaling Law for the Size Effect on Superelasticity at the Nanoscale Promotes the Use of Shape‐Memory Alloys in Stretchable Devices

Görüntü işleme algoritması kullanarak elektrotermal mikro-aktüatörün karakterizasyonu

Microstructure of Stress‐Induced Martensite in Micron‐Sized Zirconia Single Crystal Spheres

Contact Info

Product

Resources

About