2013
DOI: 10.1364/ol.38.002732
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Ultrahigh-efficiency apodized grating coupler using fully etched photonic crystals

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Cited by 153 publications
(103 citation statements)
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“…Moreover, the CE of such uniform shallowly etched grating couplers is limited not only by power leakage to the substrate, but also by the intrinsic mode mismatch between the gratings and SSMFs. For applications where only fully etched silicon waveguides are present on a photonic-integrated circuit, such as multimode multiplexers [9] or multicore fiber couplers [10], fully etched grating couplers are preferred [11][12][13][14][15][16] in order to simplify the fabrication process. Table 1 summarizes the performances of state-of-theart fully etched and shallowly etched grating couplers that have been demonstrated over the past few years.…”
mentioning
confidence: 99%
“…Moreover, the CE of such uniform shallowly etched grating couplers is limited not only by power leakage to the substrate, but also by the intrinsic mode mismatch between the gratings and SSMFs. For applications where only fully etched silicon waveguides are present on a photonic-integrated circuit, such as multimode multiplexers [9] or multicore fiber couplers [10], fully etched grating couplers are preferred [11][12][13][14][15][16] in order to simplify the fabrication process. Table 1 summarizes the performances of state-of-theart fully etched and shallowly etched grating couplers that have been demonstrated over the past few years.…”
mentioning
confidence: 99%
“…1(d). Apodized grating couplers [10] are used to couple light in and out of the MRR and the in-to-through total insertion loss of the MRR away from resonance is 9 dB. The diameter of the MRR is 120 µm, which corresponds to a measured free-spectral range (FSR) of ̴ 100 GHz.…”
Section: Static Characterization Of the Dfb Laser And Mrr Structurementioning
confidence: 99%
“…The size of our pulse shaper is about 4 mm 2 . We use fully etched apodized grating couplers [26] for the coupling between fiber and chip. There are five steps in the fabrication.…”
Section: Vol 24 No 21 | 17 Oct 2016 | Optics Express 24393mentioning
confidence: 99%