2002
DOI: 10.1063/1.1493651
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Ultrafast trapping times in ion implanted InP

Abstract: Asϩ and P ϩ implantation was performed on semi-insulating ͑SI͒ and p-type InP samples for the purpose of creating a material suitable for ultrafast optoelectronic applications. SI InP samples were implanted with a dose of 1ϫ10 16 cm Ϫ2 and p-type InP was implanted with doses between 1 ϫ10 12 and 1ϫ10 16 cm Ϫ2 . Subsequently, rapid thermal annealing at temperatures between 400 and 700°C was performed for 30 sec. Hall-effect measurements, double-crystal x-ray diffraction, and time-resolved femtosecond differenti… Show more

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Cited by 10 publications
(7 citation statements)
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References 14 publications
(12 reference statements)
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“…This thermalization slows at high fluence [ Fig. 6(a)], in keeping with many, [28][29][30] but not all, 31 prior observations. The slowing is attributed to the hot-phonon effect: 32 hot electrons couple primarily to LO phonons.…”
supporting
confidence: 49%
“…This thermalization slows at high fluence [ Fig. 6(a)], in keeping with many, [28][29][30] but not all, 31 prior observations. The slowing is attributed to the hot-phonon effect: 32 hot electrons couple primarily to LO phonons.…”
supporting
confidence: 49%
“…6,7 The main results are summarized in Table I, which shows the electrical and optical characteristics of the samples as measured by the Hall effect and time resolved photoluminescence on these samples, after annealing at 600 and 700°C. Prior to implantation, a semi-insulating InP wafer has a mobility eff , of approximately 2000 cm 2 V Ϫ1 s Ϫ1 , sheet carrier concentration N s of ϳ10 7 cm Ϫ2 and sheet resistance R s of ϳ3 ϫ10 8 ⍀/ᮀ.…”
Section: Electrical and Optical Propertiesmentioning
confidence: 99%
“…Ion implanted InP has a great deal of potential in terms of device applications; because of its short carrier lifetimes, this material could be used in saturable absorbers for the mode locking of solid state lasers, and when p-InP samples are implanted, or Fe ϩ is implanted into the semi-insulating material, it is possible to achieve high sheet resistivities in addition to the short lifetimes, and thereby obtain a material which could be used for fabrication of ultrafast photodetectors. 6,7 High resistivity InP has also been investigated through isolation studies. [8][9][10][11] Below we present the results from our investigations into the structural, electrical, and optical properties of implanted semi-insulating InP, focusing in particular on how the damage profile can be correlated with profiles of electrical characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…In general, the decay times are shorter for the lower annealing temperaiures, at which the annealing of the crystal lattice should be less complete, resulting in a greater concentration of non-radiative recombination.centres. This trend of shorter decay times with lower annealing temperatures has been found for implantation with other ions also [9]. The periodic fringes which appear on the negative angle side of the main peak after implantation have been associated with a well defined (steep strain gradient) region of positive strain (expansion).…”
Section: Resultsmentioning
confidence: 75%
“…& E due to the activation of the shallow donors, which can also be seen in the increase of N, to values > lOI3 as well as the increase of kE to -1.5 times the unimplanted value. Implantation with other elements such as P, Cia and In has yielded similar electrical behaviour as a function of annealing temperature, although with peculiarities resulting from the individual implant species [9]. Table I lists the optical lifetimes measured for samples implanted with As+, and after annealing at 600 and 700T for 30 seconds.…”
Section: Resultsmentioning
confidence: 94%