Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions

Yan, Shuhua; Lü, Kun; Li, Bin; Chen, Yimo; Xi, Xiang; Wu, Yulie; Wu, Xuezhong; Xiao, Dingbang

doi:10.1088/1361-6439/abedcc

Cited by 14 publications

(5 citation statements)

References 29 publications

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“…Xiao et al [ 94 ], Lu et al [ 111 , 112 , 113 ], Li et al [ 114 , 115 , 116 ], and Shi et al [ 117 , 118 , 119 ] improved the fabrication method of Li et al [ 110 ] by putting molds on an adjustable whirling platform and using a femtosecond ablation method to release the shell with T-shape masses to enhance the symmetry of the shell resonators and decrease roughness. Figure 14 shows the fabrication process, final product and performance of the HRG (Sun et al [ 120 ]).…”

Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

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Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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“…The research object of this paper is the FS-MHR independently developed by the cooperative unit. Its structure is shown in figures 1(a) and (b), which is respectively a transparent spherical shell without coating and a spherical shell with metal coating [28]. The uncoated fused silica micro hemisphere shell is made of high-temperature softening and air-blowing molding technology.…”

Section: Theoretical Model Establishment and Analysismentioning

confidence: 99%

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Wang,

Hu,

Zheng

et al. 2023

Meas. Sci. Technol.

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Micro-electro mechanical system resonant gyroscope plays a more and more important role in inertial navigation. As a core sensing component of micro resonant gyroscope, fused silica micro hemispherical resonator (FS-MHR) is widely concerned because of its great performance potential. The resonance frequency is one of the important characteristic parameters of micro resonators, and laser vibration measurement technology is often used for high-precision measurement of this parameter. During the measurement process, it is inevitably affected by the interference of some light sources. To explore how light affects the resonance characteristics of FS-MHR, this paper establishes a relevant theoretical model; and verifies and analyzes the influence of the photothermal effect on the resonance characteristics of FS-MHR through simulation and experiment. Revealed the trend of temperature and resonance frequency changes over time under the same lighting conditions for uncoated and metal-coated films. The measured data shows that the resonance frequency of FS-MHR coated with the metal film is more susceptible to the influence of the photothermal effect. After 60 s of illumination, the resonance frequency will increase by 6.13 Hz, and frequency splitting will also cause a deviation fluctuation of 2.35 Hz under continuous illumination. This will introduce certain errors in the measurement results, and corresponding measures need to be taken to avoid interference from the light source.

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“…The vibration-type silicon micro-gyroscope can also be further divided into linear vibration [26] and angular vibration [27]. More specifically, according to the principles and sensitive structure, the vibration-type silicon micro-gyroscope can be divided into the double frame type [28][29][30][31][32][33][34][35][36][37][38][39][40][41], tuning fork type , micro-hemisphere resonance type [71][72][73][74][75][76][77][78][79][80][81][82][83][84][85][86], vibration ring type [87][88][89][90][91][92][93][94], nested ring , piezoelectric vibration type [117][118][119][120][121][122][123]…”

Section: Main Performance Indexes Of Microgyroscopementioning

confidence: 99%

“…In 2021, the rate-integrating micro-hemispherical resonator micro-gyroscope with the structure as shown in Fig. 6(e) was produced by B. Li, et al [79][80][81][82][83][84][85][86] in China. The contact edge has 16 T-shaped test masses to increase the contact area with the surface electrode to improve the sensitivity.…”

Section: Micro-hemispherical Resonant Microgyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

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Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions

Cited by 14 publications

References 29 publications

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

MEMS and MOEMS Gyroscopes: A Review

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