2008
DOI: 10.1049/mnl:20080017
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Ultra-violet direct patterning of metal on polyimide

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Cited by 24 publications
(17 citation statements)
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“…The metalization of polymer surface are of great interest due to their numerous potential applications in fields such as surface protection [1], microelectronics industry [2], surface decoration [3], and the fabrication of biological devices [4]. Several experimental studies for preparing the metallized polymer were reported including magnetron sputtering deposition [5], electroplate [6], or electroless plating [1][2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…The metalization of polymer surface are of great interest due to their numerous potential applications in fields such as surface protection [1], microelectronics industry [2], surface decoration [3], and the fabrication of biological devices [4]. Several experimental studies for preparing the metallized polymer were reported including magnetron sputtering deposition [5], electroplate [6], or electroless plating [1][2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…In most cases, one of challenges of such a process was to enhance the adhesion between the PI and metals (e.g., Cu, Ag, and Ni) because PI has hydrophobic nature [12,14]. Surface modification using an UV light is a promising solution because it allows for the remarkable enhancement of adhesion between metals and PI without the increase of surface roughness [15,16].…”
Section: Introductionmentioning
confidence: 99%
“…The growth was further enhanced by a photochemically assistive polymer coating [11]. The resulting deposition process offers several advantages compared to other fabrication routes.…”
mentioning
confidence: 99%
“…Sequential laser write or full exposure through a photomask is also possible. Fine pitch lines down to around 15 µm have been demonstrated using a continuous-wave laser [11] and around 40 µm using UVexposure through a photomask [1]. Finally, the patterning step can be carried out in a dry phase environment and at atmospheric pressure, demonstrating its potential for reel-toreel manufacturing.…”
mentioning
confidence: 99%
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