Ultra small electro-optic field probe fabricated by aerosol deposition

Abstract

Abstract:We developed a microscopic electro-optic field probe by directly depositing a lead zirconate-titanate [PbZr 0.3 Ti 0.7 O 3 ] film onto the optical fiber edge using aerosol deposition. Its fabrication process is low-cost and relatively easy because there are no complicated procedures such as fine lithography and etching. The lateral size of the film is 125 µm, which is the same as the diameter of a typical single mode fiber, and the thickness is approximately 5 µm. An RF electro-optic signal was successfully measured over a microstrip line. The capability for detecting GHz range fields is also shown. Because it is very tiny and thin, the developed electro-optic probe has great potential for detailed electrical characterization in the microscopic regions of high performance electronic products such as the interconnecting parts between LSI packages and printed circuit boards and spaces among different LSI chips in a package. Keywords: fiber-edge electro-optic probe, aerosol deposition, lead zirconate-titanate film Classification: Photonics devices, circuits, and systems References[1] F. Caignet, S. Delmas-Bendhia, and E. Sicard, "The Challenge of Signal Integrity in Deep-Submicrometer CMOS Technology," Proc. IEEE, vol. 89, no. 4, pp. 556-573, 2001. Tech., vol. 48, no. 12, pp. 2611Tech., vol. 48, no. 12, pp. -2616Tech., vol. 48, no. 12, pp. , 2000 T. Ohara, R. Namiki, K. Igarashi, S. Wakana, and M. Tsuchiya, "Proposal of electro-optic sensor head attached to optical fiber edge," IEICE Technical Report, OPE99-22, pp. 55-60, 1999 (in Japanese

What Happens during Thermal Post‐Treatment of Powder Aerosol Deposited Functional Ceramic Films? Explanations Based on an Experiment‐Enhanced Literature Survey

“…However, it is well known that the microstructure of ceramics significantly influences the resulting mechanical and functional characteristics, [77] especially when it comes to electrically conducting or dielectric properties. Much research on PAD films was conducted on piezoelectric lead zirconate titanate (Pb(Zr x Ti 1−x )O 3 , PZT) [49,[78][79][80][81][82][83][84] and dielectric barium titanate (BaTiO 3 ). [85][86][87][88][89] Here, films in the untreated, as-deposited state exhibited a significantly lowered permittivity [90] and in case of piezo ceramics, also a lowered remanent polarization (P r ) [91,92] and coercive field strength (E c ).…”

Ultra small magneto-optic field probe fabricated by aerosol deposition

“…Using an optical microscope, we were able to confirm that a 12 -13-µm-thick film had been formed. Its lateral size was the same as that of an optical fiber, which was similar to the EO probe [13].…”

“…We previously developed an ultra small EO probe [13] intended for use in electric field measurements in microscopic regions such as connection terminals between an LSI and a printed circuit board and crevices between densely packaged devices. The probe was fabricated by directly depositing EO film onto an optical fiber facet.…”

Piezoelectric Thick Film Deposition via Powder/Granule Spray in Vacuum: A Review

“…Iwanami et al developed an electro-optic field probe [50] by depositing a 5-µm-thick PZT film onto an optical fiber edge with a length of 125 µm using AD, as shown in Figure 22. The probe was able to measure radiofrequency electro-optical signals over a microstrip line.…”