2019 IEEE International Electron Devices Meeting (IEDM) 2019
DOI: 10.1109/iedm19573.2019.8993650
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Ultra-scaled MOCVD MoS2 MOSFETs with 42nm contact pitch and 250µA/µm drain current

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Cited by 65 publications
(62 citation statements)
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“…Direct-bandgap monolayer 2D materials with their superior photosensitivity, and electrostatic gate tunability are, therefore, natural choices for next generations of bio-inspired machine vision platforms. Additionally, the atomically thin body nature of 2D monolayers allow aggressive dimension scaling and hence enable high integration density as reported recently [38,50]. Moreover, some of the early criticism of 2D materials have also been successfully addressed through the realization of low contact resistance [51], high ON current [52], integration of ultra-thin and high-k gate dielectric [53], and wafer scale growth [54,55] making them a technologically viable option.…”
Section: Direct and Analog Learning From Visual Stimuli Using 2d Photmentioning
confidence: 99%
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“…Direct-bandgap monolayer 2D materials with their superior photosensitivity, and electrostatic gate tunability are, therefore, natural choices for next generations of bio-inspired machine vision platforms. Additionally, the atomically thin body nature of 2D monolayers allow aggressive dimension scaling and hence enable high integration density as reported recently [38,50]. Moreover, some of the early criticism of 2D materials have also been successfully addressed through the realization of low contact resistance [51], high ON current [52], integration of ultra-thin and high-k gate dielectric [53], and wafer scale growth [54,55] making them a technologically viable option.…”
Section: Direct and Analog Learning From Visual Stimuli Using 2d Photmentioning
confidence: 99%
“…More recent developments in the area of brain-inspired machine vision also attempts to combine "sensing" with "memory" [13,23,29]. While some of these demonstrations exploit oxide-based [30] [31] [32] and organic memristors [33], perovskites [34], etc., twodimensional (2D) semiconducting monolayers are receiving significant attention owing to their superior photosensitivity [35,36], gate-tunability [37], scalability [38], and integration with memory [39][40][41][42][43][44]. Some show machine learning in hardware based on back-propagation algorithm implemented using software ANNs, whereas others preprocessed the images using software and demonstrated tasks like MNIST digit recognition or filtering using hardware ANNs .…”
mentioning
confidence: 99%
“…lowering 7 . IMEC developed n-type FETs with~3-layer-thick MoS 2 , with 29 nm channel length and 13 nm contact length, and achieved an on-state current of~250 μA/μm and an excellent SS = 80 m V/decade using 50 nm SiO 2 and 4 nm HfO 2 as backgate dielectric, respectively 8 . Ref.…”
mentioning
confidence: 99%
“…Ref. 8 presents a variability study of the SS, threshold voltage (V T ) and contact resistance (R C ) for hundreds of devices, which allowed the authors to design a detailed strategy for future optimizations. Similar studies were carried earlier in academia 9 but not in such small devices.…”
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confidence: 99%
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