2012
DOI: 10.1364/oe.20.004525
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Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry

Abstract: Abstract:We present recent results on the inspection of a first diffractionlimited hard X-ray Kirkpatrick-Baez (KB) mirror pair for the Coherent Xray Imaging (CXI) instrument at the Linac Coherent Light Source (LCLS). The full KB system -mirrors and holders -was under inspection by use of high resolution slope measuring deflectometry. The tests confirmed that KB mirrors of 350mm aperture length characterized by an outstanding residual figure error of <1 nm rms has been realized. This corresponds to the residua… Show more

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Cited by 135 publications
(83 citation statements)
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“…LCP-SFX experiments were carried out at the Coherent X-ray Imaging (CXI) instrument 25 at the Linac Coherent Light Source (LCLS) in the SLAC National Accelerator Laboratory (Menlo Park, California, USA). X-ray pulses of 40 fs duration at a wavelength of 1.3 Å (9.5 keV) were attenuated to ~6% (9×10 10 photons/pulse) and focused to ~1.5 μm diameter at the interaction point using Kirkpatrick-Baez mirrors 26 . GCGR-NNC0640-mAb1 complex crystals in LCP were injected across the XFEL beam using an LCP injector 24 with a 50 μm diameter nozzle at a flow rate of ~0.2 μl/min.…”
Section: Methodsmentioning
confidence: 99%
“…LCP-SFX experiments were carried out at the Coherent X-ray Imaging (CXI) instrument 25 at the Linac Coherent Light Source (LCLS) in the SLAC National Accelerator Laboratory (Menlo Park, California, USA). X-ray pulses of 40 fs duration at a wavelength of 1.3 Å (9.5 keV) were attenuated to ~6% (9×10 10 photons/pulse) and focused to ~1.5 μm diameter at the interaction point using Kirkpatrick-Baez mirrors 26 . GCGR-NNC0640-mAb1 complex crystals in LCP were injected across the XFEL beam using an LCP injector 24 with a 50 μm diameter nozzle at a flow rate of ~0.2 μl/min.…”
Section: Methodsmentioning
confidence: 99%
“…Each individual frequency is generated based on equation (11) with b n = b  2:1  10 À10  n À1:5 and a random phase n . The value for b n with b = 1 is an approximation to the measurements reported for a state-of-the-art mirror (Siewert et al, 2012). The constructed figure error profiles for the low-frequency range and for the high-frequency range are shown in the top panels of Figs.…”
Section: With Figure Errorsmentioning
confidence: 72%
“…slope error below 0.05 mrad and r.m.s. height error below 1 nm (Siewert et al, 2012) have already been manufactured. Based on equation (1), these state-of-the-art mirrors should be treated using the waveoptics approach even for low spatial frequencies.…”
Section: Introductionmentioning
confidence: 99%
“…12,27,[37][38][39][40][41] This can be thought of as a repeatability ( Below we describe a custom-made tilt stage Model N-310K021 designed and manufactured at Physik…”
Section: Design and Compliance Tests Of A Tilt Stage For A Utm Smentioning
confidence: 99%