2021
DOI: 10.1109/jmems.2021.3077009
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Ultra-Low Stress Die Attachment Based on a Stacked Multilayer Substrate

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Cited by 3 publications
(1 citation statement)
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“…It also enables packaging products to conform to standard mounting dimensions and multi-pin, packaging size reduction, and the increase of wiring density [9,73]. The substrate fabrication process can be classified into subtractive process, semi-additive process and additive process [74]. The line/space of the line formed by the semi-additive process can be advanced to the ultra-fine line/space (<10 μm/10 μm), so it is more suitable for future miniaturised semiconductor components [75].…”
Section: Substratesmentioning
confidence: 99%
“…It also enables packaging products to conform to standard mounting dimensions and multi-pin, packaging size reduction, and the increase of wiring density [9,73]. The substrate fabrication process can be classified into subtractive process, semi-additive process and additive process [74]. The line/space of the line formed by the semi-additive process can be advanced to the ultra-fine line/space (<10 μm/10 μm), so it is more suitable for future miniaturised semiconductor components [75].…”
Section: Substratesmentioning
confidence: 99%