2012
DOI: 10.1364/oe.20.007081
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Ultra-low-power carrier-depletion Mach-Zehnder silicon optical modulator

Abstract: We demonstrate a 26 Gbit/s Mach-Zehnder silicon optical modulator. The doping concentration and profile are optimized, and a modulation efficiency with the figure of merit (VπL) of 1.28 V·cm is achieved. We design an 80-nm-wide intrinsic silicon gap between the p-type and n-type doped regions to reduce the capacitance of the diode and prevent the diode from working in a slow diffusion mode. Therefore, the modulator can be driven with a small differential voltage of 0.5 V with no bias. Without the elimination o… Show more

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Cited by 90 publications
(44 citation statements)
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“…The first designs of this type were demonstrated in 2008 [21][22][23], and since then there have been numerous versions published with different variants in the design [24][25][26][27][28][29][30][31][33][34][35][36][37]. The most straightforward form of the device has the pn junction positioned in the waveguide equidistant from the rib edges [25][26][27][28][29][30][31][32]. Table 1 summarises the design parameters and performances of some example horizontal junction devices demonstrated recently.…”
Section: Chirpmentioning
confidence: 99%
See 1 more Smart Citation
“…The first designs of this type were demonstrated in 2008 [21][22][23], and since then there have been numerous versions published with different variants in the design [24][25][26][27][28][29][30][31][33][34][35][36][37]. The most straightforward form of the device has the pn junction positioned in the waveguide equidistant from the rib edges [25][26][27][28][29][30][31][32]. Table 1 summarises the design parameters and performances of some example horizontal junction devices demonstrated recently.…”
Section: Chirpmentioning
confidence: 99%
“…If it is not practical to employ a DC block between the device and the termination, additional DC power consumption should be avoided by operating around zero volts with an RF drive amplitude which is low enough not to cause the device to go into the carrier injection regime. This approach has been followed by Ding et al where a power consumption of 146 fJ/bit was achieved [32]. The key in these devices is to use highly efficient phase modulators in order to produce a sufficient modulation depth with a lower drive voltage.…”
Section: Silicon Based Carrier Depletion Modulator For Short Reach Linksmentioning
confidence: 99%
“…Despite its large bandwidth, our device has a voltage-length product of V π L = 11 Vmm which very well competes with the best silicon-photonic modulators available today [10,19,20].…”
Section: Over 90 Ghz Bandwidth Phase Modulatorsmentioning
confidence: 95%
“…Proper RF design is critical to achieve good performance on TWMZ devices. With typical silicon p-n junctions and waveguide geometries of the phase shifter, 50 Ω device impedance is usually challenging to achieve due to the high junction capacitance per unit length; instead, TWMZ is often implemented at lower impedances (near 30 Ω for instance) [3]- [6]. In addition to creating reflections to driving circuitries, low device impedance incurs bandwidth penalty when terminated with standard 50 Ω impedance [7], [8].…”
Section: Introductionmentioning
confidence: 99%