Ultra-high resistive and anisotropic CoPd–CaF2 nanogranular soft magnetic films prepared by tandem-sputtering deposition

Naoe, Masayuki; Kobayashi, N.; Ohnuma, S.; Iwasa, Takashi; Arai, Ken Ichi; Masumoto, Hiroshi

doi:10.1016/j.jmmm.2015.04.103

Cited by 8 publications

(1 citation statement)

References 43 publications

(64 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In brief, magnetic thin films are considered as the potential candidate for thin-film inductors with an aim to improve their M s , H k , ρ, and also compatibility with semiconductor manufacturing processes. Therefore, tremendous efforts have been devoted to developing better magnetic thin films over past decades [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

Lin

Cheng

Chin

2016

Entropy

View full text Add to dashboard Cite

Soft magnetic properties of Fe-Co-Ni-Al-Cr-Si thin films were studied. As-deposited Fe-Co-Ni-Al-Cr-Si nano-grained thin films showing no magnetic anisotropy were subjected to field-annealing at different temperatures to induce magnetic anisotropy. Optimized magnetic and electrical properties of Fe-Co-Ni-Al-Cr-Si films annealed at 200 • C are saturation magnetization 9.13 × 10 5 A/m, coercivity 79.6 A/m, out-of-plane uniaxial anisotropy field 1.59 × 10 3 A/m, and electrical resistivity 3.75 µΩ·m. Based on these excellent properties, we employed such films to fabricate magnetic thin film inductor. The performance of the high entropy alloy thin film inductors is superior to that of air core inductor.

show abstract