Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI)

Zain, Ahmad Rifqi Md; Johnson, Nigel P.; Sorel, Marc; Rue, R.M. De La

doi:10.1364/oe.16.012084

Cited by 197 publications

(125 citation statements)

References 17 publications

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“…The highest Q factor that we were able to obtain was 27,500 for a cavity with s = 156 nm. Higher Q factor results have been previously reported in different on-substrate PhCnB cavities [21]. We note, however, that our cavities were optimized for free-standing operation, and therefore the modest Q factors are not surprising.…”

supporting

confidence: 45%

High quality factor photonic crystal nanobeam cavities

Deotare¹,

McCutcheon²,

Frank³

et al. 2009

Applied Physics Letters

456

332

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We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 1.4 × 10 7 . By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a Quality factor of nearly 7.5 × 10 5 . The effect of cavity size on mode frequency and Quality factor was simulated and then verified experimentally.For the past decade, there has been a concerted research effort to develop ultra-high Quality (Q) factor electromagnetic cavities with dimensions comparable to the wavelength of light [1,2,3,4,5,6]. By shrinking the modal volume to near the fundamental limit of V = (λ/2n) 3 , these cavities have enabled new applications to emerge in ultrasmall lasers [7,8,9,10], strong light-matter coupling [11,12,13,14,15,16], optical switching [17], and chemical sensing [18,19], among others. Recently, there has been much interest in cavities realized in suspended nanobeams patterned with a onedimensional (1D) lattice of holes [20,21,22,23] due to their exceptional cavity figures of merit (Q and V ), relative ease of design and fabrication, and potential for novel optomechanical effects [24,25]. These apparently simple structures, which resemble very early microcavity prototypes [26], actually have Q/V factors which rival the best 2D planar photonic crystal cavities [3,4]. They also have many inherent advantages, including the possibility of realizing high Q/V cavities in moderate index materials such as SiN x [22] and facilitating coupling to ridge waveguides [21]. In addition, the near-field of the cavity is also highly "accessible", in the sense that there are two dimensions with total-internal-reflection (TIR) interfaces, which should facilitate bio-sensing applications as well as novel techniques for the dynamic control of cavity resonances [27].In this paper we describe the design, fabrication, and experimental characterization of silicon photonic crystal nanobeam (PhCnB) cavities operating near ∼ 1500 nm with measured Q factors of 7.5 ×10 5 . To our knowledge, this represents the highest Q factor ever measured in nanocavities based on photonic crystal nanobeams, and one of the highest Qs ever measured in any photonic crystal cavity. Electromagnetic field confinement in the structure [ Fig. 1(a)] is achieved by index guiding in two directions (y and z), and Bragg scattering from the 1D photonic crystal mirror in the third (x) direction. The mechanism of light confinement has been interpreted in terms of impedance matching [20,22,28] and the mode-gap effect [23]. Conceptually, the cavity can be viewed as a wavelength-scale Fabry-Perot cavity with photonic crystal mirrors which reflect and thus trap the nanobeam waveguide mode. Because the cavity mode penetrates some distance into the mirror, it is crucial that the fields do not abruptly terminate at the mirro...

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supporting

confidence: 45%

High quality factor photonic crystal nanobeam cavities

Deotare¹,

McCutcheon²,

Frank³

et al. 2009

Applied Physics Letters

456

332

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“…In [20] a Silicon-Nitride (SiN) photonic crystal nanocavity with a Q factor of 1.4 × 10 6 and a mode volume of about 0.78 (λ/n) 3 , useful for coupling to single diamond nitrogen-vacancy (NV) on a planar platform constituted by an on-chip ridge waveguide, has been designed. The fabricated nanobeam cavities [21] exhibit quality factors up to 55.000 values limited by the resolution of the grating spectrometer used for the optical characterization.…”

Section: Introductionmentioning

confidence: 99%

High-Q Photonic Crystal Nanobeam Cavity Based on a Silicon Nitride Membrane Incorporating Fabrication Imperfections and a Low-Index Material Layer

Grande¹,

Calò²,

Petruzzelli³

et al. 2012

PIER B

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Abstract-We detail the optimization of a nanobeam design and show how the fabrication imperfections can affect the optical performance of the device. Then we propose the design of a novel configuration of a photonic crystal nanobeam cavity consisting of a membrane structure obtained by sandwiching a layer of Flowable Oxide (FOx) between two layers of Silicon-Nitride (SiN). Finally, we demonstrate that the presence of a low refractive index layer does not impair the performance of the nanobeam cavity that still exhibits a Q factor and mode volume V of the order of 10 5 and 0.02 (λ/n) 3 , respectively.

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“…But multiple resonances with low transmission, of less than 5%, are also observed between the two clear resonances, in the latter two cases, and correspond to longer partial cavity structures formed between the middle mirror section and the outer ends of the outer cavity mirrors. Clearly the addition of suitable tapered hole structures at the input and output of the double cavity structure, as we have already demonstrated [6,7] to be beneficial in the single cavity case, could well suppress such undesired features. As the number of periodic mirror holes in the middle section, N m , is reduced to four (thereby becoming a 6-4-6 arrangement) for the situation with no tapered holes inserted in the middle section, a larger coupling strength is observed, with a clear resonance splitting (compare Fig.…”

mentioning

confidence: 82%

“…The multiple coupled-cavity combinations produced split the selected single cavity resonance frequency into a number of resonances that depends on the number of cavities used in the design [5]. Tapering of the PhC hole structures within and outside photonic crystal/photonic wire micro-cavities has also been shown to yield a substantial improvement in the quality factor and optical transmission at the resonance frequencies [6,7]. For applications that require a filter response with a nearly level passband and steeper skirts at the edges of the passband, the coupling strength between cavities must be carefully controlled, and additional cavities may be required to optimise the response [8].…”

mentioning

confidence: 99%

Coupling strength control in photonic crystal/photonic wire multiple cavity devices

et al. 2009

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Resonance splitting has been demonstrated for two coupled microcavities with control of the free spectral range between the resonance peaks, together with a normalised transmission level of approximately 60%. Coupled micro-cavity-based structures that were separated by two closely spaced in-line coupler sections between the two micro-cavities have also been successfully fabricated and measured. The coupling strength of the two cavities was controlled via the use of hole tapering in the middle section between the two cavities. 2D finite-difference time-domain simulation shows close agreement with the results of measurements.

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Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI)

Cited by 197 publications

References 17 publications

High quality factor photonic crystal nanobeam cavities

High quality factor photonic crystal nanobeam cavities

High-Q Photonic Crystal Nanobeam Cavity Based on a Silicon Nitride Membrane Incorporating Fabrication Imperfections and a Low-Index Material Layer

Coupling strength control in photonic crystal/photonic wire multiple cavity devices

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