Ultra-clean high-mobility graphene on technologically relevant substrates

Tyagi, Ayush; Mišeikis, Vaidotas; Martini, Leonardo; Forti, Stiven; Mishra, Neeraj Kumar; Gebeyehu, Zewdu M.; Giambra, Marco Angelo; Zribi, Jihene; Frégnaux, Mathieu; Aureau, Damien; Romagnoli, M.; Beltram, Fabio; Coletti, Camilla

doi:10.48550/arxiv.2109.00308

Cited by 1 publication

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“…Hole diameter of 60 μm with a pitch of 280 μm and an Au coating have been selected. Figure 1 shows the adopted procedure of the wet transfer [9], the graphene is coated with PMMA (AR-P 672.045, Allresist) and 15 % poly(propylene) carbonate (PPC) dissolved in Anisole (Sigma-Aldrich) to increase its rigidity [10]. After the etching of graphene from the back side via reactive ion etching (RIE), the copper is etched in an ammonium persulfate (APS, Sigma-Aldrich) solution (0.1 M concentration) overnight.…”

Section: Methodsmentioning

confidence: 99%

“…Together with growth residuals, such as grain boundaries and metallic residuals [11], affecting the mechanical strength of the membrane, PMMA residuals are also left on the film by the solvents. An ulterior chemical step, to further remove PMMA residues left could be done, as reported by [10], treating the dried device with commercial remover AR-700-61 (Allresist) for three minutes, rinsed with DI water for 10 seconds and dried again in the CPD. After finalizing the transfer, the yield of the covered holes is estimated via scanning electron microscope (SEM) imaging.…”

Section: Jinst 18 C06022mentioning

confidence: 99%

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Integration of CVD graphene in gaseous electron multipliers for high energy physics experiments

et al. 2023

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To enhance the performance of micro-patterned gaseous detectors (MPGDs) to meet the challenging requirements of future high energy physics (HEP) experiments, two-dimensional (2D) materials are attractive candidates to address the back flow of positive ions, which affects detector performance by distorting electric field lines. In this context, graphene is promising to work as selective filter for ion back flow suppression, being transparent to electrons while at the same time blocking ions. Also, graphene membranes can physically separate drift and amplification regions of the detectors, offering additional flexibility in the choice of gas mixtures and allowing independent optimizations of detector sensitivity and electron multiplication processes. Here we present an approach to integrate graphene grown via chemical vapor deposition (CVD) on gaseous electron multiplier (GEM) prototypes via a wet transfer procedure in order to suspend graphene over thousands of holes with 60 μm diameter and overcome the challenges encountered due to process steps involving liquids, mostly related with the capillary effects during drying and evaporation of them. In order to overcome the risk of damaging the membrane and decreasing the yield of suspended 2D material membranes, critical point dryer (CPD) and inverted floating method (IFM) procedures are investigated. In addition to the necessity to cover the full holes in the active area, polymeric residuals have to be minimized in order to evaluate the graphene transparency at the electron energies (i.e., < 15 eV) typically obtained in the operating conditions, measurements in these energy ranges are still not deeply investigated.

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Section: Methodsmentioning

confidence: 99%

Section: Jinst 18 C06022mentioning

confidence: 99%