UHF Surface Acoustic Wave Resonators

Staples, E.; Schoenwald, J.S.; Rosenfeld, R.C.; Hartmann, C.S.

doi:10.1109/ultsym.1974.196329

Cited by 83 publications

(9 citation statements)

References 5 publications

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“…2b). 57 The resulting resonant cavity minimizes scattering and confines the SAW energy into the substrate, improving performance. Like the SAW delay line configuration, the SAW resonators can also be used in single or dual channel 58 , but rely on more precise IDT patterning to ensure reliability and repeatability.…”

Section: Saw-based Sensorsmentioning

confidence: 99%

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

et al. 2017

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Surface acoustic waves (SAWs), are electro-mechanical waves that form on the surface of piezoelectric crystals. Because they are easy to construct and operate, SAW devices have proven to be versatile and powerful platforms for either direct chemical sensing or for upstream microfluidic processing and sample preparation. This review summarizes recent advances in the development of SAW devices for chemical sensing and analysis. The use of SAW techniques for chemical detection in both gaseous and liquid media is discussed, as well as recent fabrication advances that are pointing the way for the next generation of SAW sensors. Similarly, applications and progress in using SAW devices as microfluidic platforms are covered, ranging from atomization and mixing to new approaches to lysing and cell adhesion studies. Finally, potential new directions and perspectives on the field as it moves forward are offered, with a specific focus on potential strategies for making SAW technologies for bioanalytical applications.

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Section: Saw-based Sensorsmentioning

confidence: 99%

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

et al. 2017

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“…Therefore, we first simulate the SAW resonator using lump devices and their values are calculated using the formulas presented below. (18) These formulas are related to the physical parameters of IDT pairs N p , acoustic aperture W, wavelength λ 0 , electromechanical coupling factor K 2 , wave speed V, and capacitance/finger-pair/unit length C o . Equation 1is used to determine the series-resonance frequency of the SAW resonator; this formula is significantly affected by the piezoelectric substrate wave speed V and λ 0 .…”

Section: (C)mentioning

confidence: 99%

Investigation of Characteristics of Dual-band Ladder-type Surface Acoustic Wave for High-power Durability Duplexer

Hsu

Chen

et al. 2019

Sensors and Materials

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A circuit investigation of dual-band surface acoustic wave (SAW) filters of the ladder type is proposed. The designed filter exhibits a broader bandwidth and a sharper cutoff frequency than the conventional filter composed of the ladder and double-mode SAW (DMS) types. The SAW filters have been widely applied to the antenna duplexer given the progress in mobile communication technology. Furthermore, the SAW filters can be constructed into a wireless sensor system in combination with a SAW sensor. We demonstrate how simulations of laddertype SAW filters based on the 48°YX-LiTaO 3 are used to achieve a convenient design of the SAW band-pass filter for a high-power and wireless sensor system. These filters demonstrate the lowest insertion loss, the largest bandwidth, the optimal power durability, and a thirdorder intercept point compared with the interdigital transducer (IDT) and DMS. A simulation of a SAW resonator using the advanced design system (ADS) is performed with the lumped elements. The first passband that is applied to the Tx duplexer is in the range of 823-855 MHz, and the second passband applied to the Rx duplexer is from 867 to 898 MHz. The frequency characteristics of the ladder-type duplexer possess minimum insertion losses of 1.14 dB in the first passband and 0.54 dB in the second passband, which are similar to those of the DMS duplexer. The isolation performance between Tx and Rx is 42.22 dB at 823-898 MHz, which is less than that of the DMS duplexer. The design of the appropriate SAW band pass filter will be simplified through a precise simulation. Furthermore, the dual-band structure with a laddertype SAW can be expected to endure higher power and have a better isolation performance than conventional DMS structures.

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“…SAWRs have been extensively used as stable frequency oscillators and resonant filters due to their ruggedness and small size compared to the resonators based on bulk material vibration [7,8]. The SAWRs are used as the stable reference vibration source for this gyroscope since any mechanical gyroscope must have a stable reference vibrating motion (V ) of a mass (m) such that the angular rotation (Ω) perpendicular to the reference motion (V ) would cause Coriolis forces at the frequency of the reference motion.…”

Section: Design Principlementioning

confidence: 99%

Design and development of a MEMS-IDT gyroscope

Varadan

Suh

Xavier

et al. 2000

Smart Mater. Struct.

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The design, development and performance evaluation of a novel radio frequency microelectromechanical systems (MEMS) gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor is presented in this paper. Most of the MEMS gyroscopes based on silicon vibratory structures that utilize the energy transfer between the two vibratory modes demand small fabrication tolerances to minimize signal output when there is no rotation (i.e. zero rate output). This 1 cm × 1 cm gyroscope operates based on the principle of a surface acoustic wave (SAW) on a piezoelectric substrate. The SAWR creates SAW standing waves within the cavity space between the interdigital transducers (IDTs). The particles at the anti-nodes of a standing wave experience large amplitudes of vibration perpendicular to the plane of the substrate, which serves as the reference vibrating motion for this gyroscope. A number of metallic dots (proof masses) are strategically positioned at the anti-node locations so that the effect of the Coriolis force due to rotation will amplify the magnitude of the SAW that is generated in the orthogonal direction. The performance of this 74.2 MHz MEMS-IDT gyroscope has been evaluated using rate table and geophone setups , indicating very high sensitivity and dynamic range, which is ideal for many of the commercial applications. Unlike other MEMS gyroscopes, this gyroscope has a planar configuration with no suspended resonating mechanical structures, thereby being inherently robust and shock resistant. In view of its one-layer planar configuration, this gyroscope can be implemented for applications requiring conformal mounting onto a surface of interest.

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UHF Surface Acoustic Wave Resonators

Cited by 83 publications

References 5 publications

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

Investigation of Characteristics of Dual-band Ladder-type Surface Acoustic Wave for High-power Durability Duplexer

Design and development of a MEMS-IDT gyroscope

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