2008
DOI: 10.1016/j.snb.2008.01.008
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Two-stage polymer embossing of co-planar microfluidic features for microfluidic devices

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Cited by 28 publications
(26 citation statements)
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“…Microchips were fabricated from PMMA using a two-step embossing and solvent welding technique described previously [26,27]. The design of the microchip is shown in Fig.…”
Section: Microfluidic Device Fabricationmentioning
confidence: 99%
“…Microchips were fabricated from PMMA using a two-step embossing and solvent welding technique described previously [26,27]. The design of the microchip is shown in Fig.…”
Section: Microfluidic Device Fabricationmentioning
confidence: 99%
“…The key to the microfabrication in the plastic industry is the development of a precision mold to emboss microstructures. Several fabrication techniques have been proposed for micro-featured mold fabrication, including microcasting, silicon-based micromachining technology, lithographie galvanoformung abformung (LIGA), laser micromachining, micro-electro discharge machining (μ-EDM), micro machining, deep reactive ion etching, electrochemical micromachining, focused ion beam and wire electrical discharge machining [2][3][4][5][6][7][8][9][10][11][12][13]. Metal mold can be fabricated by mi-cro machining.…”
Section: Introductionmentioning
confidence: 99%
“…In hot embossing with metal master, 7 a master mold is imprinted on a plain PMMA substrate at glass transition temperature of PMMA. Generally direct structuring of this metal master is performed using mechanical machining or laser ablation.…”
Section: Introductionmentioning
confidence: 99%