Two-photon lithography for microelectronic application

Two-photon nanolithography of positive photoresist thin film with ultrafast laser direct writing

“…However, the widths of trenches have been only achieved at sub-micrometer scale. 15,16 It is still a challenge to fabricate nanoscale trench for expanding applications of TPNL into IC fabrication processes. By combining TPNL of positive photoresist with semiconductor devices processing techniques, we have fabricated a T-gate with a gate length of about 200 nm on the AlGaN/GaN substrate.…”

High-sensitivity two-photon photoacid generator for three-dimensional microfabrication

“…The technology of 3DLM is promising in that complex 3D microstructures, that would be either difficult or timeconsuming to fabricate by any other approach, can be produced in a single exposure step. 4,5,10,[35][36][37] We experienced limited success in attempts to microfabricate 3D structures in thick films of SU-8 containing conventional PAGs, like those of Fig. 4, using near infrared excitation.…”

“…TPE has enabled the development of 3D fluorescence imaging, 1 3D lithographic microfabrication (3DLM), [2][3][4][5][6][7] and new approaches to 3D optical data storage. 8,9 Each of these applications takes advantage of the fact that the two-photon absorption (TPA) probability depends quadratically on the excitation intensity.…”

Multiphoton-absorbing organic materials for microfabrication, emerging optical applications and non-destructive three-dimensional imaging

“…1 The non-linear, multiphoton process of two-photon absorption (TPA) has been gaining greater interest among a number of multidisciplinary areas, particularly in the rapidly developing fields of multiphoton fluorescence imaging, optical data storage and switching, optical sensor protection, telecommunications, laser dyes, 3-D microfabrication and photodynamic therapy (PDT). [2][3][4][5] The demands of such applications exceed properties and reliabilities delivered by current organic materials, underscoring the need for increasingly sophisticated non-linear optical organic materials. Since the probability of a TPA process is proportional to the square of the incident light intensity, photoexcitation is spatially confined to the focal volume.…”