Two-Dimensional Si-Nanodisk Array Fabricated Using Bio-Nano-Process and Neutral Beam Etching for Realistic Quantum Effect Devices

Abstract

The formation and evolution of defects induced by 100 MeV Si 7+ ion irradiation in the Au/n-Si (1 0 0) Schottky barrier structure were studied and correlated with the electrical characteristics of the structure. The Schottky barrier decreases to 0.67 ± 0.01 eV after irradiation at a fluence of 1 × 10 11 ions cm −2 and remains immune to further irradiation up to a fluence of 1 × 10 12 ions cm −2 . A combination of in situ deep level transient spectroscopy and current-voltage measurements of Au/n-Si diodes demonstrates that 100 MeV silicon ion irradiation introduces a hydrogen related defect complex, which has a major influence on the Schottky barrier height and the leakage current in the irradiated structure.

Quantum dot solar cells using 2-dimensional array of 6.4-nm-diameter silicon nanodisks fabricated using bio-templates and neutral beam etching

“…[9][10][11] With this process we were able to obtain a 2D array of ferritin iron oxide cores (diameter: 7 nm; density: $8 Â 10 11 cm À2 ) and…”

Plasmonic enhancements of photoluminescence in hybrid Si nanostructures with Au fabricated by fully top-down lithography

“…To solve this problem, we have employed Si nanodisks (NDs) fabricated by damage-free neutral-beam etching using bio-nano-templates [6-8]. A closely packed two-dimensional alignment of the Si ND with a diameter of 10 nm and interspacing of 2 nm was formed, where the sheet density was 5 × 10 11 cm −2 .…”

Picosecond transient photoluminescence in high-density Si-nanodisk arrays fabricated using bio-nano-templates

“…12,13 This fabrication process allows us to design the precise size and spacing of the closely packed Si-NDs with flexible film stacking. Each wavefunction can spread over neighboring NDs in this periodic regular alignment of the ND with ultrathin potential barriers.…”

“…Details of the fabrication process are described elsewhere. 13,14 The ND diameter, thickness, and the interspacing were intentionally designed at 10, 8, and 2 nm, respectively, by this ferritin protein engineering. We prepared an isolated low-density ND sample whose average inter-disk distance was more than 40 nm, as a reference.…”