Two-dimensional Si crystal growth during thermal annealing of Au/polycrystalline-Si bilayers

Allen, L. H.; Phillips, J. R.; Theodore, D.; Carter, C. B.; Soave, R.; Mayer, J. W.; Ottaviani, G.

doi:10.1103/physrevb.41.8203

Cited by 20 publications

(7 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Another purpose of incorporating Au NPs into LNO is to facilitate LNO nucleation and growth, minimize the growth domains and thus achieve better LNO film properties required for photonic device integration. Such Au‐facilitated epitaxial growth has been demonstrated in epi‐Si and other semiconductor thin films, but not yet in the growth of oxide dielectrics. As an initial demonstration, a pulsed laser deposition (PLD) technique has been used to directly grow Au‐LNO hybrid thin films.…”

Section: Introductionmentioning

confidence: 99%

Tailorable Optical Response of Au–LiNbO₃ Hybrid Metamaterial Thin Films for Optical Waveguide Applications

Huang

Jin

Misra

et al. 2018

Advanced Optical Materials

View full text Add to dashboard Cite

range of optical functions. [1][2][3][4] Enormous developments in recent years on metamaterials, photonic and plasmonic nanostructures have demonstrated novel optical functionalities such as negative refractive index, large positive refractive index, high harmonic generations, and enhanced optical nonlinearities. [5][6][7][8][9] These novel properties lead to promising device demonstrations including superlenses, biosensors, subwavelength imaging, nanolasers, waveguides, etc., which are all important optical components for future photonic integrated circuits. [5][6][7][8][9] To integrate all the photonic structures and functionalities effectively, hybrid materials in a thin film fashion with versatile optical properties and easy on-chip device integration are very much needed.Hybrid materials consisting of metals and dielectric oxides as metamaterials have presented enormous potentials in achieving novel optical properties for the proposed optical components. In particular, gold (Au)-based hybrid materials have been widely explored for the applications in nanoscale photonic structures, such as nanophotonic switch, molecular trapping and detection, wavelength selective components, and nanophotonic waveguide. [10][11][12][13] Currently, most of the Au-based hybrid materials are fabricated by "top-down" methods, where the Au nanoparticles (NPs) are deposited on top of the substrates and then followed by a set of lithography and patterning processes using direct laser writing, e-beam lithography, or focused ion beam methods. [14][15][16] Another approach is by "bottom-up" templated-assisted electroplating methods. [6,17,18] However, both techniques involve multiple steps and tedious lithography and patterning process for largescale process. Thus, the research efforts in achieving nanoscale Au-based hybrid material systems remain as a focus.In terms of the selection of oxide dielectric materials, LiNbO 3 (LNO) has attracted great research interest in the past two decades, because of its multifunctional properties including ferroelectric, piezoelectric, pyroelectric, electro-optics, acousto-optical, birefringence, and nonlinear optical properties. [19][20][21][22][23][24][25][26][27][28] LNO also presents enormous potentials in optical devices, such as electro-optical and acousto-optical modulators, Photonic integrated circuits require various optical materials with versatile optical properties and easy on-chip device integration. To address such needs, a well-designed nanoscale metal-oxide metamaterial, that is, plasmonic Au nanoparticles embedded in nonlinear LiNbO 3 (LNO) matrix, is demonstrated with tailorable optical response. Specifically, epitaxial and single-domain LNO thin films with tailored Au nanoparticle morphologies (i.e., various nanoparticle sizes and densities), are grown by a pulsed laser deposition method. The optical measurement presents obvious surface plasmon resonance and dramatically varied complex dielectric function because of the embedded Au nanoparticles, and its response can be well tailore...

show abstract

Section: Introductionmentioning

confidence: 99%

Tailorable Optical Response of Au–LiNbO₃ Hybrid Metamaterial Thin Films for Optical Waveguide Applications

Huang

Jin

Misra

et al. 2018

Advanced Optical Materials

View full text Add to dashboard Cite

show abstract

“…It should be mentioned that (re)crystallization and layer exchange were observed in various metal-semiconductor [20,26] systems and even if the Si supply is already completely or partially crystalline. Most of the authors agreed [27,28] on the fact that the concentration of Si dissolved in the Al is different at the interfaces Al/a-Si (or Al/pc-Si) from that at the Al/c-Si interface and furthermore this concentration gradient is generated by the difference in Gibbs free energy between the initial and the final state.…”

Section: The Layers Exchange Process and Growth Kineticsmentioning

confidence: 97%

Growth kinetics and crystallographic properties of polysilicon thin films formed by aluminium-induced crystallization

Pihan

Slaoui

Maurice

2007

Journal of Crystal Growth

View full text Add to dashboard Cite

“…16 It was observed that large grains would grow in size while the smaller grains would be dissolved into the Au/Si alloy. Without the overlayer, the Au is anticipated to rapidly alloy with the substrate, since previous studies 17, 18 have shown small Au particles emerging at the other side of the thick Si wafer due to diffusion of Au through the Si wafer during annealing at 950°C. The preparation for the wire growth through the VLS growth mechanism in our system involves first depositing a layer of Au on the Si͑111͒ substrate followed by the deposition of a Si overlayer both deposited at room temperature.…”

Section: Introductionmentioning

confidence: 99%

Growth of Si wires on a Si(111) substrate under ultrahigh vacuum condition

Park

Hogan

2004

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

View full text Add to dashboard Cite

show abstract

Two-dimensional Si crystal growth during thermal annealing of Au/polycrystalline-Si bilayers

Cited by 20 publications

References 14 publications

Tailorable Optical Response of Au–LiNbO₃ Hybrid Metamaterial Thin Films for Optical Waveguide Applications

Tailorable Optical Response of Au–LiNbO₃ Hybrid Metamaterial Thin Films for Optical Waveguide Applications

Growth kinetics and crystallographic properties of polysilicon thin films formed by aluminium-induced crystallization

Growth of Si wires on a Si(111) substrate under ultrahigh vacuum condition

Contact Info

Product

Resources

About

Two-dimensional Si crystal growth during thermal annealing of Au/polycrystalline-Si bilayers

Cited by 20 publications

References 14 publications

Tailorable Optical Response of Au–LiNbO3 Hybrid Metamaterial Thin Films for Optical Waveguide Applications

Tailorable Optical Response of Au–LiNbO3 Hybrid Metamaterial Thin Films for Optical Waveguide Applications

Growth kinetics and crystallographic properties of polysilicon thin films formed by aluminium-induced crystallization

Growth of Si wires on a Si(111) substrate under ultrahigh vacuum condition

Contact Info

Product

Resources

About

Tailorable Optical Response of Au–LiNbO₃ Hybrid Metamaterial Thin Films for Optical Waveguide Applications

Tailorable Optical Response of Au–LiNbO₃ Hybrid Metamaterial Thin Films for Optical Waveguide Applications