Two-dimensional multiwavelength surface emitting laser arrays fabricated by nonplanar MOCVD

Koyama, Fumio; Mukaihara, T.; Hayashi, Yusuke; Ohnoki, N.; Hatori, Nobuaki; Iga, Kenichi

doi:10.1049/el:19941305

Cited by 33 publications

(8 citation statements)

References 4 publications

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“…Modern MOVPE (Metalorganic Vapor Phase Epitaxy) and MBE (Molecular Beam Epitaxy) systems are optimised to deliver uniform layers with deviations of less than 1% across 6-inch diameter wafer. It is possible to grow nonuniform cavity thickness in a controlled manner, e.g., by patterning the substrate [8] or by varying the growth temperature on the surface [9]. However, the disadvantage of these methods is that it is challenging to control the thickness on short distances, thus limiting their applicability.…”

Section: Methods and Fabricationmentioning

confidence: 99%

Monolithic Multiwavelength VCSEL Array Using Cavity Patterning

Pissis

Tirelli²,

Bosco³

et al. 2022

IEEE Photon. Technol. Lett.

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We report on a novel approach to adjust the emission wavelength of VCSEL devices. By patterning the Fabry-Perot cavity, we can control the effective refractive index of the optical mode and thus adjust the resonant wavelength. We developed a fabrication process based on 2 steps epitaxy and a lithographic cavity patterning to define the emission wavelength at the emitter level. A multiwavelength VCSEL array with a 30 nm wavelength tuning range around 940 nm is demonstrated.

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Section: Methods and Fabricationmentioning

confidence: 99%

Monolithic Multiwavelength VCSEL Array Using Cavity Patterning

Pissis

Tirelli²,

Bosco³

et al. 2022

IEEE Photon. Technol. Lett.

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“…For the same amount of thickness variation, the wavelength change decreases nearly exponentially as the position of the layer(s) is moved away from the cavity center. Following the realization of the above-mentioned VCSEL properties, a series of work on multi-wavelength array [5][6][7][8] and tunable VCSELs was published [9][10][11]. Among them was the first 3-contact device using Peltier effect to tune the VCSEL wavelength both towards shorter (blue) and longer (red) wavelengths [9] and the first externalcavity tunable VCSEL [11].…”

Section: Wavelength Engineering In Vcselmentioning

confidence: 98%

1.55-μ m tunable VCSEL for metro-WDM applications

Chang-Hasnain

2001

SPIE Proceedings

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Wavelength-tunable lasers, detectors, and optical filters are expected to play a pivotal role in the future ultrahigh bandwidth dense-wavelength-division-multiplexed (DWDM) optical networks, enabling revolutionary new applications such as wavelength-on-demand in a reconfigurable all-optical network. Combining the unique single wavelength property of a vertical cavity and the wide mechanical movement of a MEMS mirror, we are able to demonstrate photonic devices with a very wide tuning range and excellent performance. Electrically-pumped, continuously tunable VCSEL emitting in 1530-1620 nm wavelength regime is reported. The VCSELs exhibit a continuous, repeatable and hysterisis-free wavelength-tuning characteristic. Further, the VCSELs are directly modulated at 2.5 Gbps and has >45 dB side mode suppression ratio (SMSR) over the entire tuning range. Accurate wavelength locking is achieved in ~200 usec by a simple universal locker.

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“…When a vertical-cavity surface-emitting laser (VCSEL) array is used for a multi-wavelength light source, many of the limitations are overcome by its advantages, which include easy mass production, high energy efficiency, and stable single-longitudinal mode operation. However, it is still challenging to manufacture a multi-wavelength VCSEL array, and many experimental attempts were made, which include the use of a linear gradient layer, masked molecular beam epitaxy (MBE) for selective area growth, metal-organic chemical vapor deposition (MOCVD) on a non-planar substrate, and selective area MOCVD growth [12][13][14][15]. The results indicated a lasing wavelength of 980 nm, and the wavelength spacing was too wide to use in dense-WDM (DWDM) application.…”

Section: Introductionmentioning

confidence: 99%

Compactly packaged monolithic four-wavelength VCSEL array with 100-GHz wavelength spacing for future-proof mobile fronthaul transport

Lee¹,

Mun²,

Lee³

et al. 2015

Opt. Express

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We report a cost-effective transmitter optical sub-assembly using a monolithic four-wavelength vertical-cavity surface-emitting laser (VCSEL) array with 100-GHz wavelength spacing for future-proof mobile fronthaul transport using the data rate of common public radio interface option 6. The wavelength spacing is achieved using selectively etched cavity control layers and fine current adjustment. The differences in operating current and output power for maintaining the wavelength spacing of four VCSELs are <1.4 mA and <1 dB, respectively. Stable operation performance without mode hopping is observed, and error-free transmission under direct modulation is demonstrated over a 20-km single-mode fiber without any dispersion-compensation techniques.

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Two-dimensional multiwavelength surface emitting laser arrays fabricated by nonplanar MOCVD

Cited by 33 publications

References 4 publications

Monolithic Multiwavelength VCSEL Array Using Cavity Patterning

Monolithic Multiwavelength VCSEL Array Using Cavity Patterning

1.55-μ m tunable VCSEL for metro-WDM applications

Compactly packaged monolithic four-wavelength VCSEL array with 100-GHz wavelength spacing for future-proof mobile fronthaul transport

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