Two-Axis Electromagnetic Microscanner for High Resolution Displays

Yalçınkaya, Arda Deniz; Ürey, Hakan; Brown, Dean; Montague, Tom; Sprague, R.

doi:10.1109/jmems.2006.879380

Cited by 324 publications

(198 citation statements)

References 17 publications

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“…In this paper, we introduce a novel actuation scheme that combines PZT thin-film actuation with the principle of mechanical amplification, previously used for EM-actuated and ES-actuated scanners [2], [30], to achieve high-performance PZT-actuated resonant MEMS scanners. Fig.…”

mentioning

confidence: 99%

Resonant PZT MEMS Scanner for High-Resolution Displays

Baran

Brown

Holmström

et al. 2012

J. Microelectromech. Syst.

105

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Abstract-A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kHz provides an optical scan angle of 38.5• for the 1.4-mm-wide mirror. This scanner is a significant step toward achieving full-highdefinition resolution (1920 × 1080 pixels) in mobile laser projectors without the use of vacuum packaging. The reported piezoscanner requires no bulky components and consumes < 30-mW power at maximum deflection, thus providing significant power and size advantages, compared with reported electromagnetic and electrostatic scanners. Interferometry measurements show that the dynamic deformation is at acceptable levels for a large fraction of the mirror and can be improved further for diffraction-limited performance at full resolution. A design variation with a segmented electrode pair illustrated that reliable angle sensing can be achieved with PZT for closed-loop control of the scanner.[ 2012-0116]Index Terms-High-frequency laser beam scanning, lead zirconate titanate (PZT) thin-film-actuated, microelectromechanical systems (MEMS), MEMS mirror, resonant scanner.

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mentioning

confidence: 99%

Resonant PZT MEMS Scanner for High-Resolution Displays

Baran

Brown

Holmström

et al. 2012

J. Microelectromech. Syst.

105

View full text Add to dashboard Cite

show abstract

“…As shown by the top view schematic in Figure 1, the outer frame of the micro-scanner contains the coils carrying both the slow (x) and fast-axis (y) driving signals to produce the Lorentz force with the magnetic fields applied at a 45° angle. The desired anti-phase motion with respect to the fast axis is indirectly coupled through the motion of the frame [4]. Polysilicon piezoresistors are placed at the ends of supporting beams to detect the bi-axial motions.…”

Section: Methodsmentioning

confidence: 99%

An Electromagnetically-Driven Piezoresistively Sensed CMOS MEMS Scanning Mirror for Projection Display

Lin

2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Bi-axial MEMS scanning mirrors are considered the key component for applications like laser scanning projectors and Lidars. Most studies have shown fabricated devices driven by open-loop operation without sensing, making it difficult to meet the requirements for practical applications. To facilitate bi-axial closed-loop operation, this work presents an electro magnetically-driven scanning mirror with piezoresistive sensing conveniently implemented in a CMOS (complementary metal oxide semiconductor) process. The measured resonant frequencies with respect to the slow and fast axes are 4.3 and 36.05 kHz, respectively, with the aim to provide SXGA display resolution.

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“…It so far has been tried to shift the resolution limits only by increasing the driving power in order to increase the torque acting on the MEMS mirror axes. Consequently, driving circuits for electrostatically actuated MEMS mirrors have to handle disadvantageously high driving voltages [6,7] or, in the case of electromagnetically actuated mirrors, driving currents and power consumption are disadvantageously high [4]. Thus, the MEMS mirror concept proposed in this paper is to reduce gas damping instead of further increasing power consumption.…”

Section: Mems Mirror Conceptmentioning

confidence: 99%

“…Reversely saying, a low duty cycle corresponds to a high frequency requirement for the fast axis since the total line number has to be projected within a shorter time. Besides meeting the frequency requirements of the fast axis it is extremely challenging to design and manufacture a slow axis MEMS mirror capable of performing a saw tooth like scan at high duty cycle, low linearity-error and at a sufficiently large tilt angle [4].…”

Section: Introductionmentioning

confidence: 99%

High-Q MEMS Resonators for Laser Beam Scanning Displays

2012

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This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual layer polysilicon SOI process. High Q-factors up to 145,000 have been achieved applying wafer level vacuum packaging technology including deposition of titanium thin film getters. The effective reduction of gas damping allows the MEMS actuator to achieve large amplitudes at high oscillation frequencies while driving voltage and power consumption can be minimized. Exemplarily shown is a micro scanner that achieves a total optical scan angle of 86 degrees at a resonant frequency of 30.8 kHz, which fulfills the requirements for HD720 resolution. Furthermore, results of a new wafer based glass-forming technology for fabrication of three dimensionally shaped glass lids with tilted optical windows are presented.

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Two-Axis Electromagnetic Microscanner for High Resolution Displays

Cited by 324 publications

References 17 publications

Resonant PZT MEMS Scanner for High-Resolution Displays

Resonant PZT MEMS Scanner for High-Resolution Displays

An Electromagnetically-Driven Piezoresistively Sensed CMOS MEMS Scanning Mirror for Projection Display

High-Q MEMS Resonators for Laser Beam Scanning Displays

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