Turbostratic boron carbonitride films produced by bias-assisted hot filament chemical vapor deposition

Abstract

Boron carbonitride (BCN) films with various compositions have been prepared by bias-assisted hot filament chemical vapor deposition. The three elements of B, C, and N are chemically bonded with each other and an atomic-level BCN hybrid has been formed in the films. The deposited films are composed of turbostratic structural regions ranging from a few to a few tens of nanometers. Besides, there exist some amorphous domains in the films. Boron atoms have been confirmed to be incorporated into the films with a concentration up to 70 at. %. The interplanar spacing of 3.49 Å is found to be independent of the film composition in this range. These films show a blueshift in photoluminescence peak with increasing B content. These findings show that the electronic structure of BCN compounds can be controlled by changing compositions and the BCN compounds are blue-light emitting materials.

Deposition of boron doped DLC films on TiNb and characterization of their mechanical properties and blood compatibility

“…There the fingerprint region (1350 to 1700 cm −1 ) contains overlapped peaks that were assigned as follows: 800–880 cm −1 to the C–H out-of-plane bending, 1100–1400 cm −1 to the C–H x bending mode, 1400–1600 cm −1 to the aromatic sp 2 C stretching modes and 1500–1700 cm −1 to the olefinic sp 2 C stretching modes. [35] Another strong absorption band at 1250–1280 cm −1 is attributed to the B-C stretching modes. [36]…”

Graphene Synthesis and Band Gap Opening

“…However, the thickness of these films has been of the order of a few nanometers to microns. Moreover, these films showed poor crystalline quality [161][162][163] . All these works report atomic hybrids of B, C and N with semiconducting electronic properties.…”

Photoluminescence of boron nitride nanosheets exfoliated by ball milling

“…5,6 Other hBN or BCN materials normally show a broad and dominant luminescence band at $300-400 nm related to impurities and intrinsic defects. 4,[7][8][9][10] Recently, nanosheets, such as graphene and BN nanosheets, have attracted enormous attention due to their superior mechanical, 11 electrical, 12 magnetic, 13 optical, 14 and thermal 15 properties. BN nanosheets have been produced by different methods, including mechanical peeling, 16,17 solution exfoliation, 18-21 chemical reaction, 22 chemical vapor deposition (CVD), 23,24 as well as low-energy ball milling.…”