2018
DOI: 10.3390/mi9100519
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Tunnel Encapsulation Technology for Durability Improvement in Stretchable Electronics Fabrication

Abstract: Great diversity of process technologies and materials have been developed around stretchable electronics. A subset of them, which are made up of zigzag metal foil and soft silicon polymers, show advantages of being easy to manufacture and low cost. However, most of the circuits lack durability due to stress concentration of interconnects entirely embedded in elastic polymer silicone such as polydimethylsiloxane (PDMS). In our demonstration, tunnel encapsulation technology was introduced to relieve stress of th… Show more

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Cited by 9 publications
(9 citation statements)
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References 23 publications
(26 reference statements)
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“…8,9,21,22 Fifth, a horizontal spring-like structure of metal interconnects has been constructed by lithography and etching processes. [23][24][25][26][27][28][29] These horseshoe-patterned interconnects have the advantage of high conductivity and stretchability, but require large surface areas for one electrode. The length of the electrode is limited up to 20 cm because the houseshoe-pattern is constructed by micromachining tools such as mask aligners and sputters which are developed for 8-in.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…8,9,21,22 Fifth, a horizontal spring-like structure of metal interconnects has been constructed by lithography and etching processes. [23][24][25][26][27][28][29] These horseshoe-patterned interconnects have the advantage of high conductivity and stretchability, but require large surface areas for one electrode. The length of the electrode is limited up to 20 cm because the houseshoe-pattern is constructed by micromachining tools such as mask aligners and sputters which are developed for 8-in.…”
Section: Introductionmentioning
confidence: 99%
“…Since the cracked film can deflect and twist out of plane, tribranched microcracks of thin metal film can sustain up to 30% stretch but the length of the microcrack electrode is limited up to 20 cm which is determined by the size of vacuum chamber of metal sputter . Fifth, a horizontal spring‐like structure of metal interconnects has been constructed by lithography and etching processes . These horseshoe‐patterned interconnects have the advantage of high conductivity and stretchability, but require large surface areas for one electrode.…”
Section: Introductionmentioning
confidence: 99%
“…Xu [53] provided a liquid encapsulation (LE) method to resolve the stretchability limitation, but it also has drawbacks in that a vast volume of liquid introduces leakage as a possible failure mode and free-floating electronic components can result in a risk of short circuits. Leng [54] presented a tunnel encapsulation method to improve the device stretchability, but it would become hardly operable when being applied in ultrasmall device encapsulation, owing to the poor dissolving effect on the Recently, stretchable inorganic electronic devices are rapidly developed, comprising emerging design strategies and fabrication techniques for assembling high-performance electronic components in slight, soft, and flexible forms, with broad medical and industrial applications. Although reliable encapsulation plays an indispensable role in offering physical and chemical protection for flexible devices, there are relatively few studies on flexible encapsulation, and conventional encapsulation methods still suffer from low stretchability.…”
mentioning
confidence: 99%
“…There are 10 papers published in this Special Issue, covering new strategies for a paradigm shift in the design [ 1 , 2 , 3 ], fabrication [ 4 , 5 , 6 , 7 ], and encapsulation [ 8 , 9 , 10 ] of next-generation flexible systems. Xiao et al [ 1 ] proposed an “island-bridge” strategy to design high-performance stretchable electronics composed of inorganic rigid components so that that can they can be conformally transferred to non-developable surfaces.…”
mentioning
confidence: 99%
“…These intrinsically soft circuits can easily match the mechanical impedance of biological tissue and brings significant opportunities for innovation in modern bioelectronics and electrical engineering. A “tunnel encapsulation” strategy is proposed by Leng et al [ 8 ] in order to avoid the typical lack of durability due to stress concentration of flexible interconnects entirely embedded in elastic polymer silicones, such as polydimethylsiloxane (PDMS).…”
mentioning
confidence: 99%