Tuning the H/E* ratio and E* of AlN coatings by copper addition

Guo, Jun; Wang, Huaiyong; Meng, Fanping; Liu, Xiang; Huang, Feng

doi:10.1016/j.surfcoat.2013.04.008

Cited by 64 publications

(30 citation statements)

References 29 publications

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“…The appearance of broad peaks corresponding to the (100) plane of wurtzite AlN with increase in discharge power can be attributed to the increased fluence [37,38] of the sputtered Al atoms on the substrate surface. In our earlier reported work [28], an increase in discharge power resulted in the appearance of the (002) resistance to plastic deformation [27] or low contact pressure [45], leading to reduced lateral spread in the coating.…”

Section: Accepted Manuscriptmentioning

confidence: 84%

“…Hence, the coating becomes difficult to be worn by the tungsten carbide balls. Guo et al[45] reported significant increase in the wear resistance of AlN coatings by incorporating Cu atoms into AlN. Similarly, Jagannadham et al[46] reported a low wear rate for hard AlN coatings obtained by pulsed laser deposition technique on silicon.The higher normal load increased the frictional force between the ball and the coating, during wear test.…”

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confidence: 97%

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Mechanical and tribological properties of crystalline aluminum nitride coatings deposited on stainless steel by magnetron sputtering

Choudhary

Mishra

et al. 2015

Journal of Nuclear Materials

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Section: Accepted Manuscriptmentioning

confidence: 84%

mentioning

confidence: 97%

Mechanical and tribological properties of crystalline aluminum nitride coatings deposited on stainless steel by magnetron sputtering

Choudhary

Mishra

et al. 2015

Journal of Nuclear Materials

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“…With further increasing f N 2 , the H slightly decreases. The E* as a function of f N 2 shows a similar behavior to that of H. Namely, the E* increases in the range of 2.0 ccm < f N 24 .0 ccm with increasing f N 2 , and then slightly decreases with further increasing f N 2 . Figure 3 shows XRD patterns of the films deposited at f N 2 ¼ 0, 0.5, 3.0, 5.0 and 6.0 ccm.…”

Section: Resultsmentioning

confidence: 55%

“…23,24) A hard coating with a high H/E* shows a high resistance to plastic deformation, which causes better wear resistance. Musil et al, have reported that a hard coating material having H/E* > 0.1 exhibits excellent wear resistance.…”

Section: Wear Properties Change By Varying F Nmentioning

confidence: 99%

Hardness and Wear Properties of Ti-Mo-C-N Film

et al. 2016

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The hardness and wear properties of Ti-Mo-C-N films were investigated by nanoindentation and ball-on-disc measurements, respectively. Ti-Mo-C-N films were deposited onto a stainless steel substrate by a reactive RF magnetron sputtering in the mixture of argon (7.5 ccm) and nitrogen (06.0 ccm) gases using Ti 25 Mo 25 C 50 target. Ti-Mo-C film deposited without nitrogen gas flow showed a hardness of 34.8 GPa. The hardness drastically decreased with increasing nitrogen gas flow rate (f N2 ) and reached to a minimum hardness of 16.4 GPa at f N2 ¼ 2:0 ccm. Contrarily, at over f N2 ¼ 3:0 ccm, the hardness drastically increased with increasing f N2 and reached a maximal value of 32 GPa, and then slightly decreased again with further increase of f N2 . It was found by TEM observation that the drastic decrease in hardness is caused by the formation of nanocrystalline microstructure, while the increase in hardness is due to the microstructural change from nanocrystalline to columnar structure. The friction coefficient decreased with increasing f N2 and the film deposited at f N2 ¼ 5:0 ccm showed a minimum value of 0.27. The simple oxidation test in air indicated that lubricious MoO 3 is easy to be formed in the film deposited at a high f N2 , which should cause the reduction of friction coefficient.

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“…According to the definition, toughness is the ability of a material to absorb energy during deformation up to fracture [45]. Experiments indicate [41,44,46,47,49] that the higher is the toughness of the system coating/substrate as the higher is the H 3 /E ⁎2 ratio (resistance to plastic deformation). It is shown [44] that the resistance of coating to the formation of cracks increases with increasing ratio H 3 /E ⁎2 ratio, i.e.…”

Section: Nanoindentation Studiesmentioning

confidence: 99%

Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN–TiB2–TiSi2

et al. 2016

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High temperature composite target AlN-TiB 2 -TiSi 2 with heterogeneous distribution of compounds (AlN-50 wt.%; TiB 2 -35 wt.%; TiSi 2 -15 wt.%) is used for sputtering via combined reactive/non-reactive DC magnetron sputtering onto substrate materials either cylindrical polished steel (Fe, 18%-Ni, 12%-Cr, 10%-Ti) 3 mm diameter or monocrystalline silicon. The gradient coating has been produced by sequential non-reactive and reactive sputtering of the target. The structural and morphological properties of the deposited films are analyzed by transmission electron microscopy, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. The tribo-mechanical properties are studied by means of nanoindentation and nanowear tests. The gradient film is composed of two layers with different microstructure and elemental composition. The first layer with thickness~200 nm is mainly based on light B, C and N as well metal elements Al, Si and Ti. The presence of very well distributed nanocrystals embedded in an amorphous matrix, with crystal sizes ranging from 5 to 40 nm is observed in the second layer~700 nm thickness and composed of Al, Ti, Si, B, and N. Films show very flat surfaces, with roughness around 0.35 nm. The hardness, elastic modulus, elastic recovery (W e ), H/E ⁎ ratio and H 3 /E ⁎2 ratio are determined as 17.55 GPa, 216.7 GPa, 60%, 0.08 and 0.12 GPa, respectively. Nanowear tests demonstrate relatively high wear resistance of the coatings. Samples show promising characteristics for hard protective adaptive coatings and diffusion barriers due to short propagation of dislocations in the amorphous matrix and the elastic and hard nature of the nanocomposite structure.

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Tuning the H/E* ratio and E* of AlN coatings by copper addition

Cited by 64 publications

References 29 publications

Mechanical and tribological properties of crystalline aluminum nitride coatings deposited on stainless steel by magnetron sputtering

Mechanical and tribological properties of crystalline aluminum nitride coatings deposited on stainless steel by magnetron sputtering

Hardness and Wear Properties of Ti-Mo-C-N Film

Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN–TiB2–TiSi2

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