Tuning of reflection spectrum of a monolithic high-contrast grating by variation of its spatial dimensions

Marciniak, Magdalena; Broda, Artur; Gębski, Marcin; Dems, Maciej; Muszalski, J.; Czerwiński, A.; Ratajczak, J.; Marona, Ł.; Nakwaski, W.; Lott, James A.; Czyszanowski, Tomasz

doi:10.1364/oe.396693

Cited by 9 publications

(7 citation statements)

References 24 publications

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“…We consider two orthogonal polarizations: transverse-electric (TE), for which electric field of electromagnetic wave is parallel to the stripes, and transversemagnetic (TM), where the magnetic component of the electromagnetic field is parallel to the grating stripes. We have validated the accuracy of the method in numerous analyses 4,8,28 by comparison with experimental reflection spectra of MHCGs and with simulated transmission spectra from other numerical models, 29 showing very good agreement. These previous studies support the results and conclusions presented here.…”

Section: ■ Influence Of Cross-sectional Shape On the Maximal Power Re...mentioning

confidence: 79%

“…In the measurement setup, a tunable Ti:sapphire laser was used in the characterization of optical power reflectance, enabling spectral range tuning from 950 to 1050 nm and nearly normal incidence across the beam with respect to the MHCG surface. More details on the experimental setup and the measurements are provided in ref .…”

Section: Influence Of Cross-sectional Shape On the Maximal Power Refl...mentioning

confidence: 99%

“…MHCGs open a new route to the facile design and fabrication of highly reflecting mirrors and high Q -factor optical microcavities . The enhanced interaction of light and matter in such cavities has found many applications in science and technology.…”

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confidence: 99%

“…Since the properties of MHCGs are to a large extent independent of the material in which the MHCGs are patterned, their applications are not limited to the replacement of DBR mirrors in VCSELs, as noted in refs 6 and 7. MHCGs open a new route to the facile design and fabrication of highly reflecting mirrors 8 and high Q-factor optical microcavities. 9 The enhanced interaction of light and matter in such cavities has found many applications in science and technology.…”

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confidence: 99%

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Impact of Stripe Shape on the Reflectivity of Monolithic High Contrast Gratings

Marciniak

Chang

et al. 2021

ACS Photonics

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Monolithic high contrast gratings (MHCGs) composed of a one-dimensional grating patterned in a monolithic layer provide up to 100% optical power reflectance and can be fabricated in almost any semiconductor and dielectric material used in modern optoelectronics. MHCGs enable monolithic integration, polarization selectivity, and versatile phase tuning. They can be from 10 to 20 times thinner than distributed Bragg reflectors. The subwavelength dimensions of MHCGs significantly reduce the possibility of ensuring the smoothness of the sidewalls of the MHCG stripes and make precise control of the shape of the MHCG stripe cross-section difficult during the etching process. The question is then whether it is more beneficial to improve the etching methods to obtain a perfect cross-section shape, as assumed by the design, or whether it is possible to find geometrical parameters that enable high optical power reflectance using the shape that a given etching method provides. Here, we present a numerical study supported by the experimental characterization of MHCGs fabricated in various materials using a variety of common surface nanometer-scale shaping methods. We demonstrate that MHCG stripes with an arbitrary cross-section shape can provide optical power reflectance of nearly 100%, which greatly relaxes their fabrication requirements. Moreover, we show that optical power reflectance exceeding 99% with a record spectral bandwidth of more than 20% can be achieved for quasi-trapezoidal cross-sections of MHCGs. We also show that sidewall corrugations of the MHCG stripes have only a slight impact on MHCG optical power reflectance if the amplitude of the corrugation is less than 16% of the MHCG period. This level of stripe fabrication precision can be achieved using the most current surface etching methods. Our results are significant for the design and production of a variety of photonic devices employing MHCGs. The flexibility with regard to crosssection shape facilitates the reliable fabrication of highly reflective subwavelength grating mirrors. This in turn will enable the manufacture of monolithically integrated high-quality-factor optical micro-and nanocavity devices.

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Section: ■ Influence Of Cross-sectional Shape On the Maximal Power Re...mentioning

confidence: 79%

Section: Influence Of Cross-sectional Shape On the Maximal Power Refl...mentioning

confidence: 99%

mentioning

confidence: 99%

mentioning

confidence: 99%

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Impact of Stripe Shape on the Reflectivity of Monolithic High Contrast Gratings

Marciniak

Chang

et al. 2021

ACS Photonics

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“…In the analysis, we use 60 plane waves that enable numerical relative error below 10 −8 . The model has been shown to have high reliability by comparison with experimental results [41,42]. In the analysis we consider transverse electric (TE) polarization, where the electric field is parallel to the grating stripes.…”

Section: Methodsmentioning

confidence: 99%

Concept of Inverted Refractive-Index-Contrast Grating Mirror and Exemplary Fabrication by 3D Microprinting

Pruszyńska-Karbownik¹,

Jandura²,

Dems³

et al. 2023

Preprint

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Highly reflective mirrors are indispensable components in a variety of state-of-the-art photonic devices. Typically used, bulky, multi-layered distributed Bragg (DBR) reflectors are limited to latticematched semiconductors or nonconductive dielectrics. Here, we introduce an inverted refractiveindex-contrast grating (ICG), as compact, single layer alternative to DBR. In the ICG, a subwavelength one-dimensional grating made of a low refractive index material is implemented on a high refractive index cladding. Our numerical simulations show that the ICG provides nearly total optical power reflectance for the light incident from the side of the cladding whenever the refractive index of the grating exceeds 1.75, irrespective of the refractive index of the cladding. Additionally, the ICG enables polarization discrimination and phase tuning of the reflected and transmitted light, the property not achievable with the DBR. We experimentally demonstrate a proof-of-concept ICG fabricated according to the proposed design, using the technique of 3D microprinting in which thin stripes of IP-Dip photoresist are deposited on a Si cladding. This one-step method avoids laborious and often destructive etching-based procedures for grating structuration, making it possible to implement the grating on any arbitrary cladding material.

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Monolithic High Contrast Grating Integrated with Metal: Infrared Electrode with Exceptionally High Conductivity and Transmission

Ekielski,

Głowadzka,

Bogdanowicz

et al. 2023

Adv Funct Materials

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The design of transparent conductive electrodes (TCEs) for optoelectronic devices requires a trade‐off between high conductivity and transmittivity, limiting their efficiency. This paper demonstrates the best ever achieved TCEs with the novel approach to fabricating TCEs that effectively alleviates this trade‐off: a monolithic high contrast grating integrated with metal (metalMHCG). The metalMHCG enables higher electrical conductivity than other TCEs, while providing transmissive and antireflective properties. It focuses on infrared spectrum TCEs, which are essential for sensing, thermal imaging, and automotive applications. However, due to elevated free carrier absorption, they are much more demanding than TCEs for the visible spectrum. It demonstrates a record 75% absolute transmittiance of unpolarized light, resulting in a record 108% transmittance relative to plain GaAs substrate. It achieves even larger absolute transmittance of polarized light, reaching 92% or 133% relative transmittance. Despite the record high transmittance, the sheet resistance of the metalMHCG is the best ever reported, several times lower than any other TCE, ranging from 0.5 to 1 Ω Sq−1.

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Tuning of reflection spectrum of a monolithic high-contrast grating by variation of its spatial dimensions

Cited by 9 publications

References 24 publications

Impact of Stripe Shape on the Reflectivity of Monolithic High Contrast Gratings

Impact of Stripe Shape on the Reflectivity of Monolithic High Contrast Gratings

Concept of Inverted Refractive-Index-Contrast Grating Mirror and Exemplary Fabrication by 3D Microprinting

Monolithic High Contrast Grating Integrated with Metal: Infrared Electrode with Exceptionally High Conductivity and Transmission

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