Tunable MEMS capacitor: influence of fluids

Abstract

The effect of a dielectric liquid on the tunability of capacitor operating in RF domains is evaluated. The RF measurement shows a high variation of the resonant frequency accompanied with a low insertion loss. Moreover, the fluid positions between electrodes modify the capacitance value up to Tr = 6660% at 600 MHz. The quality factor decreases in response of water filling from Q max = 51.9 when it is empty to Q min = 1.49 when it is fully filled. According to the finite-element method analysis, the change of the dielectric permittivity influences the capacitor performances. Essentially, the tuning range of the capacitance and the quality factor could reach, respectively: Tr = 7660% and Q min = 35.

Analyzes of VCO performances based on RF spiral inductors

“…Nevertheless, the RF MEMS inductor increases the tuning range and decreases the power consumption. In the future work, we investigate our tunable microfluidic inductor [7] and capacitor [8][9] on VCO performances.…”

A review on structure–property relationships in dielectric ceramics using high‐entropy compositional strategies

“…The ability to tune the dielectric permittivity is of great importance in various applications, such as capacitors, energy storage devices, and dielectric resonators. [46][47][48][49] Additionally, the disordered atomic arrangement and lattice distortion effects in high-entropy ceramics can contribute to the reduction of dielectric loss. The random distribution of multiple elements and the resulting lattice distortion can impede the propagation of phonons and charge carriers, leading to decreased energy dissipation and improved dielectric loss characteristics.…”

“…As a result, high‐entropy ceramics can exhibit significantly higher dielectric permittivity compared to traditional ceramics. The ability to tune the dielectric permittivity is of great importance in various applications, such as capacitors, energy storage devices, and dielectric resonators 46–49 . Additionally, the disordered atomic arrangement and lattice distortion effects in high‐entropy ceramics can contribute to the reduction of dielectric loss.…”

Modeling of Microfluidically Tuned Capacitor for RF Applications

“…This change alters the distribution of electric field, which varies capacitor's performances. The microfluidic actuation is used in wide tunable RF MEMS components [6][7][8][9].…”

“…The most important feature in RF MEMS capacitors is variation range, which is usually related to the nature of the used mode. Since the invention of MEMS components the researchers have tried to cross the limits of variation based on different actuations modes [1][2][3][4][5][6]. In this paper, we study a highly tunable RF MEMS capacitor based on microfluidic actuation.…”