2018
DOI: 10.1155/2018/3468017
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Tunable Inductors Using Integrated Vanadium Dioxide Phase Change Thin Films

Abstract: This paper presents tunable inductors designed with vanadium dioxide (VO 2 ) thin film to implement tunability. Two types of configurations, a single line coil inductor and a dual line coil inductor, are proposed. Tunable inductance is realized by thermally controlling VO 2 thin film stub to be an insulator or a conductor. The measurements of inductors are taken in the frequencies range from 0.01 GHz to 10 GHz. The electrical model has been developed to derive the corresponding inductance. The results show tha… Show more

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Cited by 3 publications
(8 citation statements)
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“…Further due to their original geometry the inductors exhibit a tuning range of 77% (improving the 55% in 37 or 32% in 38 ) and have a Q max_on / Q max_off ratio of 0.87 unlike 0.27 in our previous work 37 . It is worth pointing out that the inductor while facing the limited conductivity levels of VO 2 on SiO 2 /Si substrates reveals a 2.33 better Q max_on value in in respect to other VO 2 based reconfigurable inductors such as the SiO 2 /Sapphire inductors reported in 51 where the conductivity levels of VO 2 exceed 300.000 S/m.…”
Section: Introductionmentioning
confidence: 85%
“…Further due to their original geometry the inductors exhibit a tuning range of 77% (improving the 55% in 37 or 32% in 38 ) and have a Q max_on / Q max_off ratio of 0.87 unlike 0.27 in our previous work 37 . It is worth pointing out that the inductor while facing the limited conductivity levels of VO 2 on SiO 2 /Si substrates reveals a 2.33 better Q max_on value in in respect to other VO 2 based reconfigurable inductors such as the SiO 2 /Sapphire inductors reported in 51 where the conductivity levels of VO 2 exceed 300.000 S/m.…”
Section: Introductionmentioning
confidence: 85%
“…Our designs realized a larger inductance value while maintaining a similar Q factor compared to our previous work in Ref. 7. Recently our research group has been focusing on the reconfigurable technologies that are feasible to be implemented and favorable to conventional micromachining techniques.…”
mentioning
confidence: 60%
“…Recently our research group has been focusing on the reconfigurable technologies that are feasible to be implemented and favorable to conventional micromachining techniques. [4][5][6][7][8][9][10][11][12][13] Over the years, we have developed a good understanding of employing thin films phase change material such vanadium dioxide in RF devices such as an RF switch and preliminary investigation of tunable inductors. Vanadium dioxide (VO 2 ) based tunable inductor offers advantages of faster switching speed, smaller size, easier fabrication, and lower cost.…”
mentioning
confidence: 99%
“…The quality factor of an inductor is most commonly defined as (11) -by grounding its second port [23][24][25][28][29][30]. It is usually evaluated until x changes sign and becomes negative.…”
Section: Applications In Reconfigurable Inductors With Vanadium Dioxi...mentioning
confidence: 99%
“…In order to prove the utility of our CAD implementation, we show that, while grounding the second port of newly fabricated Vanadium dioxide two port inductors [22], one may get the Q-frequency dependency directly from the S 11reflection coefficient parameter, thus avoiding classical 2D Qfrequency plots previously employed by us [22][23] or other authors [24][25], in these types of evaluations. The proposed visualization on the 3D Smith chart proves its effectiveness for passive circuits, especially when quality factors do not exceed big values [22][23][24][25], being particularly useful for Vanadium dioxide temperature variations studies on Q-where Q degrades as temperature increases, but potentially applicable in all inductors frequency dependent factor evaluations. Here we test the temperature dependence of Q for fabricated inductors with VO 2 by sweeping it from 25 °C to 50 °C-directly from the vector network analyser with the newly developed technique.…”
Section: Introductionmentioning
confidence: 98%