2018
DOI: 10.1109/lpt.2018.2857469
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Tunable Grating Coupler by Thermal Actuation and Thermo-Optic Effect

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Cited by 13 publications
(4 citation statements)
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“…Generally, there are two main approaches of fiber-to-chip coupling, namely vertical coupling (or off-plane coupling) and butt coupling (or edge coupling/in-plane coupling) [12,13], according to the relative position of fiber and the photonic chip. For vertical coupling, grating couplers are mostly used, and fiber is placed above the device vertically or slightly slanted at a certain degree to ensure high coupling efficiency [14][15][16][17][18][19][20][21][22][23]. Grating couplers have some major advantages including compact size, wafer-level testing capability, and flexible coupling position, while there are also some drawbacks such as a relatively low coupling efficiency typically below 3 dB, narrow bandwidth, and high wavelength sensitivity.…”
Section: Introductionmentioning
confidence: 99%
“…Generally, there are two main approaches of fiber-to-chip coupling, namely vertical coupling (or off-plane coupling) and butt coupling (or edge coupling/in-plane coupling) [12,13], according to the relative position of fiber and the photonic chip. For vertical coupling, grating couplers are mostly used, and fiber is placed above the device vertically or slightly slanted at a certain degree to ensure high coupling efficiency [14][15][16][17][18][19][20][21][22][23]. Grating couplers have some major advantages including compact size, wafer-level testing capability, and flexible coupling position, while there are also some drawbacks such as a relatively low coupling efficiency typically below 3 dB, narrow bandwidth, and high wavelength sensitivity.…”
Section: Introductionmentioning
confidence: 99%
“…The only presented MEMS tunable grating coupler targeting this application achieves a Δλ T max of 22.8 nm with 12 V actuation [99]. This performance is comparable to power-hungry thermo-optic tuning of grating couplers [107], [108], including MEMS-mediated thermo-optic designs [109], which in general feature δλ and efficiency variations well below the 6 nm and 0.5 dB reported by the MEMS device.…”
Section: Grating Couplersmentioning
confidence: 73%
“…These two types of optical coupling are distinguished from one another by the differing relative locations of the optical fiber and the silicon optical chip [6][7][8][9] . Vertical coupling mostly adopts a grating coupler, which is widely used due to its advantages of small size, flexible coupling position, and easy wafer testing [10][11][12] . However, this vertical coupling method also has the disadvantages of low coupling efficiency (loss higher than 3 dB), narrow bandwidth, polarization sensitivity, etc.…”
Section: Introductionmentioning
confidence: 99%