“…Recently, nitride-based resistive switching compounds, such as AlN, ZrN, HfN, NiN, and SiN, have been reported to have excellent non-volatile properties comparable to metal oxides in terms of operation speed, endurance, and retention [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 ]. Especially, AlN is suitable for resistive switching memory owing to its high thermal conductivity and large band gap with good insulating properties [ 29 , 30 , 31 , 32 ] and could be improved by additional approaches such as the scaling, bilayer structure, and doping like oxide-based RRAM. Robust resistive switching was reported for the TiN/AlN/TiN device [ 33 ] and Pt/AlN:Cu/PT device [ 34 ] for non-volatile memory applications.…”