Tunable dielectric thin films by aqueous, inorganic solution-based processing

Alemayehu, Matti B.; Davis, John Evan; Jackson, Milton N.; Lessig, Brian; Smith, Logan; Sumega, Jon David; Knutson, Chris; Beekman, Matt; Johnson, David C.; Keszler, Douglas A.

doi:10.1016/j.solidstatesciences.2011.09.007

Cited by 18 publications

(25 citation statements)

References 4 publications

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“…8 In addition to studying pre-nucleation clusters to inform metal ion speciation in water, there is much motivation to investigate any persistent, discrete aqueous clusters that may exist under certain hydrolysis or dissolution conditions. [9][10][11][12] Furthermore, the simple discovery of new cluster geometries and chemistries inspires us in their elegance and advances the field of inorganic synthesis. [9][10][11][12] Furthermore, the simple discovery of new cluster geometries and chemistries inspires us in their elegance and advances the field of inorganic synthesis.…”

Section: Maishamentioning

confidence: 99%

An overview of selected current approaches to the characterization of aqueous inorganic clusters

et al. 2015

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This Perspective article highlights some of the traditional and non-traditional analytical tools that are presently used to characterize aqueous inorganic nanoscale clusters and polyoxometalate ions. The techniques discussed in this article include nuclear magnetic resonance spectroscopy (NMR), small angle X-ray scattering (SAXS), dynamic and phase analysis light scattering (DLS and PALS), Raman spectroscopy, and quantum mechanical computations (QMC). For each method we briefly describe how it functions and illustrate how these techniques are used to study cluster species in the solid state and in solution through several representative case studies. In addition to highlighting the utility of these techniques, we also discuss limitations of each approach and measures that can be applied to circumvent such limits as it pertains to aqueous inorganic cluster characterization.

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Section: Maishamentioning

confidence: 99%

An overview of selected current approaches to the characterization of aqueous inorganic clusters

et al. 2015

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“…This method, recently coined "Prompt Inorganic Condensation", or PIC, has been used to make high quality films of a number of oxides, including dielectrics, [53][54][55][56][57][58] transparent conducting oxides, 59,60 and high-resolution inorganic resists. 61,62 In these examples using PIC, dehydration and nitrate removal are shown to occur without negatively affecting film morphology, allowing the preparation of dense, smooth films at relatively low temperatures.…”

Section: Introductionmentioning

confidence: 99%

High Quality Magnetic Oxide Thin Films Prepared via Aqueous Solution Processing

et al. 2016

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Recent progress in multiferroic materials and spintronic devices has renewed interest in metal oxide ferromagnetic and ferrimagnetic materials. Here we report the preparation of thin films of nanocrystalline ferrimagnetic CoFe 2 O 4 (CFO) using an environmentally benign aqueous solution processing route. The evolution of the structural, optical, and magnetic properties as a function of post-deposition annealing temperature is reported. For the highest annealing temperature (800°C), the remanence, coercivity, and resistivity values are comparable with those of films fabricated by epitaxial growth methods and exceed the quality of CFO nanocrystals prepared by other wet-chemical syntheses. In addition to the ability to make high quality ferrite films, the aqueous solution processing strategy offers great flexibility for tuning film properties by incorporating or substituting additional transition metal ions.

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“…Because of the high volume fraction of organic ligands and solvent which must be expelled during processing, the resulting films often suffer from relatively low density, high porosity, and unwanted electronic defects. 14 A related paradigm, -prompt inorganic condensation‖ or PIC, [15][16][17][18][19][20][21] has been developed using aqueous solutions of metal inorganic salts. PIC minimizes the number and size of counterions in thin film precursor solutions while simultaneously forming solubilized polynuclear metal-oxo or -hydroxo species.…”

Section: Introductionmentioning

confidence: 99%

“…22 PIC has been used to make a variety of amorphous semiconducting and insulating metal oxide (as well as metal sulfate and metal phosphate) thin films, including aluminum phosphate oxide films. 15,19,21,23 Generally, this technique produces films which meet or surpass the quality of sol-gel derived films and frequently rival that of vapor-deposited films. 15,22,[24][25][26][27] Aluminum phosphate oxide (Al 2 O 3-3x (PO 4 ) 2x or -AlPO‖) is of interest as a catalyst for the conversion of methanol to dimethyl ether, 28 as a cathode coating material for lithium-ion batteries, 29 and as a dielectric component for thin-film devices.…”

Section: Introductionmentioning

confidence: 99%

“…15,22,[24][25][26][27] Aluminum phosphate oxide (Al 2 O 3-3x (PO 4 ) 2x or -AlPO‖) is of interest as a catalyst for the conversion of methanol to dimethyl ether, 28 as a cathode coating material for lithium-ion batteries, 29 and as a dielectric component for thin-film devices. 15,19,30 Previously, vapor phase methods (atomic layer epitaxy (ALE) 31 and atomic layer deposition (ALD) 32,33 ) have been used to prepare AlPO films. Solution-phase PIC has also been employed to prepare amorphous AlPO films with dielectric properties comparable to thermally grown SiO 2 .…”

Section: Introductionmentioning

confidence: 99%

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Influence of composition and processing parameters on the properties of solution-processed aluminum phosphate oxide (AlPO) thin films

Norelli

Plassmeyer

Woods

et al. 2016

Solid State Sciences

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The effects of precursor solution concentration, composition, and spin-processing parameters on the thickness and electrical properties of ultra-smooth aluminum oxide phosphate (Al 2 O 3-3x (PO 4 ) 2x or -AlPO‖) thin films prepared using aqueous solutions are reported. Compositions were verified by electron probe micro-analysis and range from Al 2 O 1.5 (PO 4 ) to AlPO 4 (x = P:Al from 0.5-1.0). Film thicknesses were determined using X-ray reflectivity measurements and were found to depend systematically on solution concentration, P:Al ratio, and spin-speed.Metal-insulator-semiconductor devices were fabricated to determine electrical properties as a function of composition. As the P:Al ratio increased from 0.5 to 1.0, the dielectric constant decreased from 6.0 to 4.6, leakage currents increased from 0.45 to 65 nA cm -2 at 1MV cm -1 and dielectric breakdown (defined as leakage currents >10 µA cm -2 ) decreased from 9.74 to 2.84 MV cm -1 . These results establish composition, concentration, and spin-speed for the production of AlPO films with targeted thicknesses and electrical properties.

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Tunable dielectric thin films by aqueous, inorganic solution-based processing

Cited by 18 publications

References 4 publications

An overview of selected current approaches to the characterization of aqueous inorganic clusters

An overview of selected current approaches to the characterization of aqueous inorganic clusters

High Quality Magnetic Oxide Thin Films Prepared via Aqueous Solution Processing

Influence of composition and processing parameters on the properties of solution-processed aluminum phosphate oxide (AlPO) thin films

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