“…From the above experimental observations, it is considered that nitrogen introduced into D 2 /CH 4 plasmas behaves not only as the scavenger for carbon film formation [7][8][9][10], but also for hydrogen absorption in the carbon deposited films. Since we used CH 4 gas for carbon impurity into deuterium plasmas, molecules generated in H/D-C-N low temperature plasmas show complicated and various molecular reactions both in gas phase and in the carbon films.…”