Tribological properties of platinum/ruthenium/nitrogen doped diamond-like carbon thin films deposited with different negative substrate biases

Abstract

Abstract:The platinum/ruthenium/nitrogen doped diamond-like carbon (PtRuN-DLC) thin films were deposited on Si substrates via DC magnetron sputtering by varying negative substrate bias. The tribological performance of the PtRuN-DLC films was systematically investigated using ball-on-disc microtribological test. The Raman results showed that the increased negative substrate bias significantly increased the number of sp 3 bonds in the PtRuN-DLC films as a result of the increased kinetic energies of impinging ions. The adhesion strength of the PtRuN-DLC films apparently decreased with increased negative substrate bias due to the promoted residual stress in the films. The tribological results clearly revealed that the increased negative substrate bias decreased the friction and wear of the PtRuN-DLC films by improving the sp 3 bonded cross-linking structures of the films. It can be concluded that the PtRuN-DLC films could effectively prevent their underlying Si substrates from wear as the negative substrate bias had a significant influence on the tribological properties of the PtRuN-DLC films.

Interface Engineering and Controlling the Friction and Wear of Ultrathin Carbon Films: High sp3 Versus High sp2 Carbons

“…3) For tribology on the micro‐ and macro‐scale the friction may be related to wear although a direct relation has so far not been shown clearly. However, while studying the adhesion strength, wear, and friction of carbon films, Khun and Liu found a good correlation showing a trend of increased adhesion strength, higher wear resistance, and lower friction . Thus, increased interfacial adhesion and higher wear resistance could also have some influence on the lower friction in sample 3SiN14CF.…”

“…As sample 3SiN14CF possessed additional interfacial bonding due to the SiN x interlayer, the relatively higher interfacial adhesion observed in sample 3SiN14CF may be the reason for its slightly higher wear resistance than that of sample 17CF in the ball‐on‐disk tribological tests. Increased adhesion of the overcoat on the substrate has been shown to enhance the wear resistance of carbon‐based overcoats . We also performed rigorous long‐term wear tests to gain more insight into the role of the increased interfacial adhesion on the wear durability (wear resistance) of the overcoats, which will be discussed later.…”

Tribology of multilayer coatings for wear reduction: A review

“…On the other hand, DLC is a unique material that offers outstanding properties, such as extreme hardness, high ductility, chemical inertness, high wear resistance and low COF (0.1 to 0.2). These properties together with optical transparency and biocompatibility make DLC an excellent candidate for a broad range of tribological applications in various industries [11][12][13][14]. The structure, composition and 250 Friction 5(3): 248-262 (2017) | https://mc03.manuscriptcentral.com/friction functionality of DLC coatings vary depending on the deposition method and condition.…”