2022
DOI: 10.1007/s12046-022-01842-1
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Parametric optimization of CVD process for DLC Thin film coatings: a comparative analysis

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Cited by 7 publications
(3 citation statements)
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“…Metaheuristics find wide usage in almost all aspects of optimization problems. For example, metaheuristics have been used in design optimization [56][57][58][59], process optimization [60][61][62][63], structural optimization [64,65], knapsack problems [66,67], workflow scheduling [68], image segmentation [69][70][71], etc.…”
Section: Metaheuristic Algorithms For Movie Recommendation Systemsmentioning
confidence: 99%
“…Metaheuristics find wide usage in almost all aspects of optimization problems. For example, metaheuristics have been used in design optimization [56][57][58][59], process optimization [60][61][62][63], structural optimization [64,65], knapsack problems [66,67], workflow scheduling [68], image segmentation [69][70][71], etc.…”
Section: Metaheuristic Algorithms For Movie Recommendation Systemsmentioning
confidence: 99%
“…Therefore, depositing DLC films on silicon as hard protective layers can effectively enhance the surface properties of materials and prolong the service life of materials, as suggested by systematically studying the law of depositing DLC films on silicon. [26,27] This study aimed to explore the influence of different silicon substrates on the structure of DLC films by selecting different types of silicon substrates during the deposition of DLC films through PECVD. The chemical structure and microstructure of the films were investigated using spectroscopy and microscopy.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, depositing DLC films on silicon as hard protective layers can effectively enhance the surface properties of materials and prolong the service life of materials, as suggested by systematically studying the law of depositing DLC films on silicon. [ 26,27 ]…”
Section: Introductionmentioning
confidence: 99%