MEREC-MABAC Based-Parametric Optimization of Chemical Vapour Deposition Process for Diamond-Like Carbon Coatings

Prabhukumar, Sellamuthu; Chohan, Jasgurpeet Singh; Kalita, Kanak

doi:10.1007/978-3-031-50158-6_41

Cited by 2 publications

(1 citation statement)

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“…The potential industrial application of the N-DLC film are the coating used in critical engine parts, mechanical face seals, magnetic hard discs, surgical tools, etc. (Prabhukumar et al, 2023). Zeng et al (2017) Ball-on disc methods and the results showed that the mechanical properties of the coating synthesized using PACVD enhanced as compared to other synthesis methods (Lukaszkowicz and Paradecka, 2016).…”

Section: Introductionmentioning

confidence: 97%

Effect of deposition temperature on the tribo-mechanical properties of nitrogen doped DLC thin film

Shanmugasundar,

Vanitha,

Logesh

et al. 2024

Front. Mech. Eng.

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The tribomechanical characteristics of diamond-like carbon (DLC) coatings are notably superior to other hard coatings, making them highly desirable for industrial applications. This study focuses on the synthesis of nitrogen-doped DLC (N-DLC) films through chemical vapor deposition (CVD) methods, with an emphasis on varying the deposition temperature. Comprehensive characterization techniques such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and nanoindentation were employed to investigate the morphological and mechanical attributes of these coatings. The thickness of the films, measured using a Dektak profilometer, demonstrated an increase from 1.9 to 2.8 µm as the deposition temperature rose. Nanoindentation testing revealed that the film deposited at 900°C exhibited the highest hardness (H) and modulus of elasticity (E), measuring 21.95 and 208.3 GPa, respectively. Conversely, the film deposited at 1,000°C showed the lowest values, with H and E at 14.23a and 141.9 GPa, respectively. The H/E ratio of the coatings initially rose from 0.096 to 0.106 as the deposition temperature increased from 800°C to 900°C. However, for deposition temperatures exceeding 900°C the H/E ratio began to decline.

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Section: Introductionmentioning

confidence: 97%