Tribological properties of a-C/Cr(N) coatings in micro-and nano-scales

Zhang, P.; Wang, L.; Nie, Xueyuan

doi:10.1016/j.surfcoat.2006.07.220

Cited by 20 publications

(5 citation statements)

References 8 publications

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“…The wear scar volume was obtained by the measurement of average height h of the worn surface and the wear rate k was calculated by equation k = h/nW, where n is the number of scanning passes. 20 Finally, the electrical resistivity values of the films were calculated from measured sheet resistivity data as determined from four point probe measurements with Model 280C (Four Dimensions) instrument and using the film thicknesses determined from SEM images.…”

Section: Methodsmentioning

confidence: 99%

Reactive sputtering of δ-ZrH2 thin films by high power impulse magnetron sputtering and direct current magnetron sputtering

Högberg¹,

Tengdelius²,

Samuelsson³

et al. 2014

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Reactive sputtering by high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS) of a Zr target in Ar/H 2 plasmas was employed to deposit Zr-H films on Si(100) substrates, and with H content up to 61 at.% and O contents typically below 0.2 at.% as determined by elastic recoil detection analysis. X-ray photoelectron spectroscopy reveals a chemical shift of 0.7 eV to higher binding energies for the Zr-H films compared to pure Zr films consistent with a charge transfer from Zr to H in a zirconium hydride. X-ray diffraction shows that the films are single-phase δ-ZrH 2 (CaF 2 -type structure) at H content > 55 at.% and pole figure measurements give a 111 preferred orientation for these films.Scanning electron microscopy cross-section images show a glasslike microstructure for the HiPIMS films, while the DCMS films are columnar. Nanoindentation yield hardness values of 5.5-7 GPa for the δ-ZrH 2 films that is slightly harder than the 5 GPa determined for Zr films and with coefficients of friction in the range 0.12-0.18 to compare with the 0.4-0.6 obtained 2 for Zr films. Wear resistance testing show that phase-pure δ-ZrH 2 films deposited by HiPIMS exhibit up to 50 times lower wear rate compared to those containing a secondary Zr phase.Four-point probe measurements give resistivity values in the range of 100-120 µΩ cm for the δ-ZrH 2 films, which is slightly higher compared to Zr films with values in the range 70-80 µΩ cm.

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Section: Methodsmentioning

confidence: 99%

Reactive sputtering of δ-ZrH2 thin films by high power impulse magnetron sputtering and direct current magnetron sputtering

Högberg¹,

Tengdelius²,

Samuelsson³

et al. 2014

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…Kok et al have reported COF values in the range of 0.16 to 0.31 in C/Cr multilayered coating deposited with different bias voltages . Zhang and coauthors have shown average COF values of 0.3 to 0.5 in a‐C/Cr(N) multilayered coating . Guo and coworkers have demonstrated average COF in the range of 0.1 to 0.2 in (Cr, N)‐DLC/DLC multilayered coating deposited with different bias voltages …”

Section: Resultsmentioning

confidence: 99%

“…Kok and coauthors have reported hardness value of 25 GPa and Young's modulus of 319 GPa in C/Cr multilayered coating deposited by combined steered cathodic arc and unbalanced magnetron sputtering techniques with different bias voltages . Zhang et al have achieved maximum hardness of 12.76 GPa and Young's modulus of 149.92 GPa in a‐C/Cr(N) multilayered coating . Guo and coauthors have demonstrated hardness of 17.45 GPa and Young's modulus of 191.21 GPa in (Cr, N)‐DLC/DLC multilayered coating deposited by a combination of filtered and direct cathodic vacuum arcs with different bias voltages …”

Section: Resultsmentioning

confidence: 99%

“…Multilayered carbon composite coatings based on DLC:Cr:Cu, a‐C/a‐C, Cr–C/a‐C:Cr, WC x /a‐C, TiC/a‐C, TiC x /a‐C, TiN x /a‐C, and TiB 2 /a‐C have shown great superiority in combined properties to their monolithic amorphous carbon (a‐C) coatings. Many researchers have reported that chromium‐incorporated layer has been found to enhance adhesion, fracture toughening, load bearing performance, and tribological properties . Several research groups have investigated metal‐incorporated multilayered DLC coating to improve its tribological performances .…”

Section: Introductionmentioning

confidence: 99%

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Corrosion and wear resistance properties of multilayered diamond‐like carbon nanocomposite coating

Subramanian

Mohan

Bera

et al. 2018

Surface & Interface Analysis

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Multilayered diamond-like carbon (DLC) nanocomposite coating has been deposited on silicon and stainless steel substrates by combination of cathodic arc evaporation and magnetron sputtering. In order to make DLC coating adhered to metal substrate, a chromium interlayer has been deposited with constant bias voltage of −150 V applied to the substrate. Dense multilayered coating consists of metallic or nonmetallic and tetrahedral carbon (ta-C) layers with total thickness of 1.44 μm. The coating has been studied for composition, morphology, surface nature, nanohardness, corrosion resistance, and tribological properties. The composition of the coating has been estimated by energy-dispersive spectroscopy. Field-emission scanning electron microscopy and atomic force microscopy have been used to study the surface morphology and topography. I D /I G ratio of ta-C:N layer obtained from Raman spectroscopy is 1.2, indicating the disorder in the layer. X-ray photoelectron spectroscopy studies of individual ta-C:N, CrN, and Cr-doped DLC layers confirm the presence of sp 2 C, sp 3 C, CrN, Cr 2 N, and carbidic carbon, and sp 2 C, sp 3 C, and Cr carbide. Nanohardness studies show the maximum penetration depth of 70 to 85 nm. Average nanohardness of the multilayered DLC coating is found to be 35 ± 2.8 GPa, and Young's modulus is 270 GPa. The coating demonstrates superior corrosion resistance with better passivation behavior in 3.5% NaCl solution, and corrosion potential is observed to move towards nobler (more positive) values. A low coefficient of friction (0.11) at different loads is observed from reciprocating wear studies. Wear volume is lower at all loads on the multilayered DLC nanocomposite coating compared to the substrate.

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“…As profundidades de desgaste foram determinadas através de ensaios de nanoesclerometria, utilizando equipamento de nanoindentação e nanoesclerometria Hysitron Triboscope, acoplado ao microscópio de Força Atômica Shimadzu modelo SPM 9500 J3 ® , com cargas constantes de 700, 1000 e 1300 µN e com comprimento de risco de 10,0 µm. [8][9][10] A ponta de diamante utilizada foi a cônica com raio de curvatura menor que 1,0 µm e ângulo de 60 o . As profundidades de desgaste foram determinadas analisando as imagens de AFM.…”

Section: Ensaios De Nanoesclerometriaunclassified

O Papel Da Razão Entre a Dureza E O Módulo Elástico Na Profundidade De Desgaste De Revestimentos De Ticy E Tinx Obtidos Por Deposição Reativa via Triodo Magnetron Sputtering

Recco,

Tschiptschin

2007

ABM Proceedings

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ResumoFilmes de TiC y e TiN x foram depositados via Triodo Magnetron Sputtering. sobre silício monocristalino (111). Variando-se a quantidade de gás reativo (nitrogênio ou metano) na atmosfera do plasma, foram obtidos filmes com diferentes estequiometrias e propriedades mecânicas. A composição química foi determinada por WDS (Wavelenght Dispersive Spectrometry). A espessura e a microestrutura dos filmes foram determinadas por microscopia eletrônica de varredura (MEV), através da análise da seção da fratura das lâminas de silício. A topografia da superfície foi determinada por microscopia de força atômica. A dureza e o módulo elástico foram caracterizados por ensaios de nanoindentação instrumentada. A profundidade de desgaste foi determinada através de ensaios de nanoesclerometria (nanoscratch test) com cargas constantes de 700, 1000 e 1300 µN. Para a deposição reativa com nitrogênio e titânio observa-se que a medida em que à razão entre a dureza e módulo elástico aumenta ocorre um decréscimo na profundidade de desgaste. O mesmo comportamento foi observado para a deposição reativa utilizando-se o gás metano para a obtenção de TiC y . Palavras-chave: Triodo magnetron sputtering; Razão H/E; Nanodureza; Nanoesclerometria. THE ROLE OF THE RATIO BETWEEN THE HARDNESS AND THE ELASTIC MODULE IN THE DEPTH WEAR OF TIC Y AND TIN X COATINGS DEPOSITED REACTIVE DEPOSITION TRIODE MAGNETRON SPUTTERING AbstractsTiC y and TiN x films were deposited by triode magnetron sputtering on monocrystalline silicon (111). Changing the amount of reactive gas (nitrogen or methane) in the plasma atmosphere, led to films with different stoichiometric and mechanical properties. The chemical composition was determined by WDS (Wavelenght Dispersive Spectrometer). The thickness and the microstructure of the films had been determined by scanning electronic microscopy (SEM), through the analysis of the fracture section of the silicon wafer. The topography of the surface was determined by atomic force microscopy. Hardness and elastic module were determined using depth sensing techniques. The wear depth was determined using nanoscratch test with constant loads of 700, 1000 and 1300 µN. For the reactive deposition with nitrogen and titanium it was observed that when the ratio between the hardness and elastic module increases, a decrease in the wear depth occurs. The same behavior was observed for the reactive deposition using methane gas for obtaining TiC y .

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Tribological properties of a-C/Cr(N) coatings in micro-and nano-scales

Cited by 20 publications

References 8 publications

Reactive sputtering of δ-ZrH2 thin films by high power impulse magnetron sputtering and direct current magnetron sputtering

Reactive sputtering of δ-ZrH2 thin films by high power impulse magnetron sputtering and direct current magnetron sputtering

Corrosion and wear resistance properties of multilayered diamond‐like carbon nanocomposite coating

O Papel Da Razão Entre a Dureza E O Módulo Elástico Na Profundidade De Desgaste De Revestimentos De Ticy E Tinx Obtidos Por Deposição Reativa via Triodo Magnetron Sputtering

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