2003
DOI: 10.1109/tmtt.2003.809678
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Trap-free process and thermal limitations on large-periphery SiC MESFET for RF and microwave power

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Cited by 17 publications
(4 citation statements)
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“…In hall measurement, HPSI substrates also showed better mobility than V-doped substrates. Mobility of HPSI substrates was 113 cm 2 /V-s and that of the V-doped SI substrates was 66.9 cm 2 /V-s. SiC MESFETs have been reported to suffer from instabilities in drain current due to charge trapping [7]. This phenomenon is very detrimental to RF performance because it decreases the transistor available power and device linearity.…”
Section: Resultsmentioning
confidence: 99%
“…In hall measurement, HPSI substrates also showed better mobility than V-doped substrates. Mobility of HPSI substrates was 113 cm 2 /V-s and that of the V-doped SI substrates was 66.9 cm 2 /V-s. SiC MESFETs have been reported to suffer from instabilities in drain current due to charge trapping [7]. This phenomenon is very detrimental to RF performance because it decreases the transistor available power and device linearity.…”
Section: Resultsmentioning
confidence: 99%
“…Silicon carbide (SiC)-based metal-semiconductor field effect transistors (MESFETs) are one of the most promising technologies for high-power, high-frequency and hightemperature applications in the commercial and military communications [1][2][3][4]. This is mainly due to the wide band gap (3.26 eV), high breakdown field (3 MV cm −1 ), large thermal conductivity (4.9 W cm −1 K −1 ) and high electron saturation velocity (2 × 10 7 cm s −1 ).…”
Section: Introductionmentioning
confidence: 99%
“…The ideal thermal conductivity of 4H-SiC is 4.9 W/cm.K at 300 K, which causes the device performances of 4H-SiC MESFET to be less influenced by the self-heating effect than those of Si-and GaAs-based devices under the same power dissipation. [7−9] However, as investigated before, [7,10] the self-heating effect is still one of the crucial issues in 4H-SiC MESFETs.…”
Section: Introductionmentioning
confidence: 99%