“…In addition, some research groups assume significant gas-phase reactions [4][5][6][7], whereas others assume gas-phase reactions play no role in film deposition kinetics [8,9]. Despite the range of assumptions made regarding growth chemistry, most models are able to match experimental data when predicting growth rate and uniformity [3][4][5]10,11]. This, in fact, may be due to differences in chamber pressure, susceptor temperature, precursor flow rates, residence time in heated zones, and reactor geometry.…”