Transport and Reaction Behaviors of Precursors during Metalorganic Vapor Phase Epitaxy of Gallium Nitride

An overview of gallium nitride growth chemistry and its effect on reactor design: Application to a planetary radial-flow CVD system

“…What happens after methane elimination is not fully understood. Oligomerization of the dimethylgallium amide, (CH 3 ) 2 Ga:NH 2 , to form a six member ring compound, [(CH 3 ) 2 Ga:NH 2 ] 3 , is frequently included as a major pathway in the mechanisms proposed in the literature [3][4][5][6]10,11].…”

“…In addition, some research groups assume significant gas-phase reactions [4][5][6][7], whereas others assume gas-phase reactions play no role in film deposition kinetics [8,9]. Despite the range of assumptions made regarding growth chemistry, most models are able to match experimental data when predicting growth rate and uniformity [3][4][5]10,11]. This, in fact, may be due to differences in chamber pressure, susceptor temperature, precursor flow rates, residence time in heated zones, and reactor geometry.…”

Combined ab initio quantum chemistry and computational fluid dynamics calculations for prediction of gallium nitride growth

“…In the specific case of GaN, a handful of past studies have reported reaction mechanisms [2,3]. All of these mechanisms are based on the one proposed originally by Mihopoulos [4].…”

“…Although there is no direct evidence of such a proposition, this mechanism has been frequently used by others for GaN growth modeling and reactor design [2,3,5].…”

Validating gallium nitride growth kinetics using a precursor delivery showerhead as a novel chemical reactor

“…What happens after methane elimination is not fully understood. Oligomerization of the dimethylgallium amide, (CH 3 ) 2 Ga:NH 2 , to form a six member ring compound, [(CH 3 ) 2 Ga:NH 2 ] 3 , is frequently included as a major pathway in the mechanisms proposed in the literature [1,[4][5][6][7][8]. The final step in the adduct formation route is unidentified, but generally is represented by the breakdown of the trimer species into low molecular weight products and large amounts of methane.…”