Transparent ZnO Thin-Film Deposition by Spray Pyrolysis for High-Performance Metal-Oxide Field-Effect Transistors

Abstract

Solution-based metal oxide semiconductors (MOSs) have emerged, with their potential for low-cost and low-temperature processability preserving their intrinsic properties of high optical transparency and high carrier mobility. In particular, MOS field-effect transistors (FETs) using the spray pyrolysis technique have drawn huge attention with the electrical performances compatible with those of vacuum-based FETs. However, further intensive investigations are still desirable, associated with the processing optimization and operational instabilities when compared to other methodologies for depositing thin-film semiconductors. Here, we demonstrate high-performing transparent ZnO FETs using the spray pyrolysis technique, exhibiting a field-effect mobility of ~14.7 cm2 V−1 s−1, an on/off ratio of ~109, and an SS of ~0.49 V/decade. We examine the optical and electrical characteristics of the prepared ZnO films formed by spray pyrolysis via various analysis techniques. The influence of spray process conditions was also studied for realizing high quality ZnO films. Furthermore, we measure and analyze time dependence of the threshold voltage (Vth) shifts and their recovery behaviors under prolonged positive and negative gate bias, which were expected to be attributed to defect creation and charge trapping at or near the interface between channel and insulator, respectively.

Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

“…The huge diversity of thin film materials available, and still to discover, implies the existence of several wet/dry, chemical/physical, and vacuum/atmospheric processing and fabrication techniques [128,129]. Regarding the scope of this work, the wet chemical deposition techniques are not discussed here; their overview can be found elsewhere, including the sol-gel [130,131], chemical bath [131,132], spray pyrolysis [133,134], electrophoretic deposition [135], and electroplating [136][137][138] techniques. Considering only dry vacuum deposition methods, it is possible to classify these techniques into two groups, physical and chemical processes [139].…”

Effect of Post-Annealing Treatment on the Morphological and Optical Properties of ZnO Thin Film Fabricated by Spraying Deposition Method

“…In order to fabricate the desired ZnO thin films, several effort have been done including its fabrication method. Sol-gel [2,3], chemical vapour deposition, sputtering [4,5] , laser ablation, spin or dip coating [2,6] , and spraying deposition [7][8][9][10] were commonly used to fabricate ZnO thin film. Among them, spraying deposition offered a simpler fabrication method, inexpensive equipment, controllable films thickness, and suitable for large area deposition [7,11] .…”

Temperature dependent studies on radio frequency sputtered Al doped ZnO thin film

“…[10] Along with a high optical transparency in the visible range, AZO films have superior electrical conductivity, good thermal and chemical stability. [11] Numerous methods and techniques have been reported to deposit AZO films like chemical vapor deposition (CVD), [12] RF magnetron sputtering, [11,13,14,15] sol-gel method, [16] spray pyrolysis, [17][18][19] and pulsed laser deposition. [20][21][22][23] RF magnetron sputtering is one of the promising methods for the deposition of AZO films because it offers film deposition at lower temperatures as well as a better adhesion than other methods.…”