Transparent conducting antimony-doped tin oxide films deposited on flexible substrates by r.f. magnetron-sputtering

Conductive and transparent Bi-doped ZnO thin films prepared by rf magnetron sputtering

“…This effect decreases the diffusion mobility for the sputtered particles and goes against the crystallinity of the film. It was the same with the report by Hao et al [20][21][22]. Fig.…”

Highly Sensitive InOx Ozone Sensing Films on Flexible Substrates

“…Figure 4 shows a normalized comparison of the exponential decays during the oxidation process at the above ozone concentrations. Although previous results utilizing SnO 2 [6] and aerosol spray pyrolysis of ZnO [7] have shown corresponding sensitivity levels for ozone of the order of 15 ppb too, to our knowledge, this is the first time that such extremely low sensing levels are reported for metal oxide thin films at room temperature (RT) on flexible substrates. The differences in the exponential decay is a measure, on the one hand, of the efficiency of these films to screen the various ozone concentrations down to the extremely low level of 15 ppb and on the other, to resolve these responses from the synthetic air, used as reference signal, within the first minute of analysis.…”

“…A new thrust for the wider use of metal oxide based gas sensors is anticipated owning to the latest integration efforts on flexible substrates [1][2][3][4]. Successful application on flexible substrates may lead to simpler, faster and inexpensive fabrication techniques targeting novel roll-to-roll and printed processing applications with obvious advantages over conventional ceramic or silicon-based technologies.…”

Electrical and Optical Properties of Solution-Based Sb-Doped SnO2 Transparent Conductive Oxides Using Low-Temperature Process

“…최근 다양한 optoelectronic device(예, touch screens, liquid crystal displays, organic solar cells, organic light emitting devices등)들의 개발 및 활용이 증가되면서, 우 수한 전기적(ρ ≤ 10 −3 Ω•cm) 및 광학적(transmittance ≥ 80 %) 특성이 요구되고 있는 투명 전도성 산화물(TCOs, transparent conductive oxides)에 대한 관심과 수요가 증 가하고 있다. [1][2][3][4] [6][7][8] 하지만 이 러한 방법들은 진공분위기와 정교한 장비가 요구되기 때 문에 산업적으로 응용하기에 고비용이 요구된다. 9) 따라 서, dip-coating, spin-coating, spray pyrolysis, inkjet-printing등이 용액 기반 제조 방법으로 보고 되고 있으 며 현재까지 솔루션 기반 ATO 박막을 제조하기 위한 연 구가 진행되고 있다.…”