Very thin carbon-based nitrogen-doped films of different thicknesses were deposited on double-side polished sapphire substrates by RF reactive magnetron sputtering. RBS and ERD were used to determine the elemental concentration in the films, and Raman spectroscopy, to determine their chemical structure. The RBS and ERD analyses indicated that the films contained carbon, nitrogen and small amounts of hydrogen and oxygen. The Gaussian-fitted and identified Raman spectra of the films showed the D and G bands in the range 1000-1800 cm−1, and the 2 D and D+G bands, in the range 2500-3100 cm−1. The photo-induced (pulsed laser, 266 nm) electron emission properties of the films were determined by measuring the cathodes’ bunch charge and calculating their quantum efficiency. The paper discusses the structural properties of the very thin nitrogen-doped carbon-based films deposited on a sapphire substrate with different thicknesses in view of their use as backside-illuminated transmissive vacuum photocathodes.