Abstract:Very thin carbon-based nitrogen-doped films of different thicknesses were deposited on double-side polished sapphire substrates by RF reactive magnetron sputtering. RBS and ERD were used to determine the elemental concentration in the films, and Raman spectroscopy, to determine their chemical structure. The RBS and ERD analyses indicated that the films contained carbon, nitrogen and small amounts of hydrogen and oxygen. The Gaussian-fitted and identified Raman spectra of the films showed the D and G bands in t… Show more
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