Transfer of Relatively Large Microstructures on Polyimide Films using Thermal Nanoimprinting

Ikoma, Ryuta; Komatsuzaki, Hiroki; Suzuki, Kenta; Komori, Takuyuki; Kuroda, Kazuaki; Saitou, Hirofumi; Youn, Sung-Won; Hiroshima, Hiroshi; Takahashi, Masaharu; Maeda, Ryutaro; Nishioka, Yasushiro

doi:10.2494/photopolymer.25.255

Cited by 10 publications

(9 citation statements)

References 11 publications

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“…Hot embossing, or nanoimprinting, onto polyimide films has also been characterized to construct deep features (>100 μm) [74,75]. This technique is similar to standard hot embossing of polymers utilizing a micropatterned Si mold that is pressed into the polymer substrate that is heated above its T g (T g = 275 °C for polyimide).…”

Section: Bonding Techniquesmentioning

confidence: 99%

Review of polymer MEMS micromachining

Kim

Meng

2015

J. Micromech. Microeng.

126

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The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed.

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Section: Bonding Techniquesmentioning

confidence: 99%

Review of polymer MEMS micromachining

Kim

Meng

2015

J. Micromech. Microeng.

126

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“…The device was based on the concept of a MEMS glucose fuel cell design to allow continuous operation of the fuel cell as reported by Togo et al (12) . This paper details the fabrication and characterization of a miniaturized AAFC with a microchannel fabricated on PI substrates using thermal nanoimprinting techniques ( 13)- (16) and MEMS technologies.…”

Section: Introductionmentioning

confidence: 99%

Ascorbic Acid Fuel Cell with a Microchannel Fabricated on Flexible Polyimide Substrate

et al. 2014

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We used microelectromechanical system techniques to fabricate a miniature ascorbic acid fuel cell (AAFC) equipped with a microchannel for the circulation of ascorbic acid solution (AAS). The fuel cell was fabricated on a flexible polyimide substrate, and a porous carbon-coated aluminum (Al) anode with the dimensions of 2.8 ×1 mm 2 and a porous carbon-coated Al cathode with the dimension of 2.8 ×10 mm 2 were fabricated using photolithography and screen-printing techniques. The porous carbon was deposited by screen-printing carbon-black ink onto the Al electrode surfaces in order to increase the effective electrode surface areas and to absorb more enzymes (bilirubin oxidase) on the cathode surface. No enzyme was deposited on the carbon coated anode surface. The microchannel with a dimension of 3 ×11× 0.2 mm 3 was fabricated using a hot-embossing technique. The maximum power of 0.60 µW at 0.58 V, with a corresponding power density of 1.96 µW/cm 2 , was realized by introducing a 200 mM concentrated AA solution at the flow rate of 30 ml/min at room temperature. No degradation of the anode and cathode was observed up to the radius of curvature of 7.5 mm, which suggests the flexibility of the AAFC.

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“…42) Therefore, a power source with an area of cm 2 order, equivalent to the area of a current cardiac pacemaker, must exhibit a power density of 10 µW=cm 2 in an aqueous an AA solution with an AA concentration between 23 and 85 µM. Mogi et al 43) reported the fabrication and characterization of a miniaturized AAFC with a microchannel fabricated on a PI substrate using thermal nanoimprinting techniques [44][45][46][47] and MEMS technologies. However, they utilized porous carbon electrodes deposited on a flexible PI film, and these electrodes cracked after repeated bending of the BFC.…”

Section: Introductionmentioning

confidence: 99%

Miniaturized ascorbic acid fuel cells with flexible electrodes made of graphene-coated carbon fiber cloth

Hoshi

Muramatsu²,

Sumi³

et al. 2016

Jpn. J. Appl. Phys.

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Ascorbic acid (AA) is a biologically friendly compound and exists in many products such as sports drinks, fruit, and even in human blood. Thus, a miniaturized and flexible ascorbic acid fuel cell (AAFC) is expected be a power source for portable or implantable electric devices. In this study, we fabricated an AAFC with anode and cathode dimensions of 3 × 10 mm2 made of a graphene-coated carbon fiber cloth (GCFC) and found that GCFC electrodes significantly improve the power generated by the AAFC. This is because the GCFC has more than two times the effective surface area of a conventional carbon fiber cloth and it can contain more enzymes. The power density of the AAFC in a phosphate buffer solution containing 100 mM AA at room temperature was 34.1 µW/cm2 at 0.46 V. Technical issues in applying the AAFC to portable devices are also discussed.

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Transfer of Relatively Large Microstructures on Polyimide Films using Thermal Nanoimprinting

Cited by 10 publications

References 11 publications

Review of polymer MEMS micromachining

Review of polymer MEMS micromachining

Ascorbic Acid Fuel Cell with a Microchannel Fabricated on Flexible Polyimide Substrate

Miniaturized ascorbic acid fuel cells with flexible electrodes made of graphene-coated carbon fiber cloth

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