Review of polymer MEMS micromachining

Kim, Brian J.; Meng, Ellis

doi:10.1088/0960-1317/26/1/013001

Cited by 127 publications

(98 citation statements)

References 336 publications

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“…Mark et al (2010), Iliescu et al (2012), Nge et al (2013), Temiz et al (2015), Kim and Meng (2015) The platform presented here is our attempt at creating a platform that can be used as widely as possible, but it is not possible to offer all advantages of other platforms, without any of their drawbacks. One of the advantages of this platform, a very thin channel wall, also is one of its drawbacks.…”

Section: Discussionmentioning

confidence: 99%

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn

Boer

Lötters

et al. 2017

Microfluid Nanofluid

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often have to be connected using (external) fluidic interconnects. This way, the fluidic interconnects will have a relatively large volume, resulting in slow response times and requiring large sample sizes.To make the ideal integrated microfluidic handling system, one fabrication process should allow many different microfluidic devices for all kinds of applications to be integrated on the same chip. The functional channels of the devices, the interconnect channels and the required interfacing electronics should be integrated on the same substrate without restricting the design options for each device.Different applications pose different demands on the fabricated system. To avoid leakage and wear, the channel walls should be mechanically strong, chemically inert and leak tight for both liquids and gasses in a large temperature range. It should be possible to locally release the channel (completely or partially) from the substrate, e.g. for thermal isolation or freedom of movement. It is required to integrate transducer structures for actuation and measurement of the devices. This can be anything from metal tracks to piezoelectric or magnetic materials or optical waveguides. Functionalization of the inside of the channel, e.g. with a catalyst or with specific coatings for (bio)chemical reactions or adhesion should be possible. Multiple channels should be able to cross each other or run inside each other. Interface electronics should be integrated directly on the chip or package to reduce noise and other parasitic effects.To be able to transfer proof-of-concepts to commercial devices, it should not only be possible to fabricate low-volume research devices, but it should also be possible to scale up the fabrication to industrial low-cost, high-volume processing in foundries. Last, and certainly not least, it should be straightforward to design the optimal fluidic element with respect to shape and size, for any application. AbstractMany microfluidic devices are made using specialized fabrication processes, limiting the ability to integrate those devices on the same chip. In this paper, a versatile technology platform is presented that allows for integration of many different devices. It provides a method to design channels in a wide range of sizes and shapes with different functionalization options in close proximity to the fluid in the channels. The latter includes release of the channels for thermal isolation or mechanical movement and metal or piezoelectric layers for actuation and read-out. The channel walls are made using silicon-rich silicon nitride to provide durable, strong, chemically inert and thermally stable channels directly below the substrate surface .

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Section: Discussionmentioning

confidence: 99%

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn

Boer

Lötters

et al. 2017

Microfluid Nanofluid

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“…In such industrial applications, the strength evaluation of polymeric materials is essential in order to secure the integrity of products. Moreover, polymer resins have been used not only in electronic devices as well as sensors but also in the microelectromechanical systems (MEMS) recently since various fabrication processes have been developed . Then, the evaluation technique for the strength of small resin components in the scale of micro/nanometer become more and more important.…”

Section: Introductionmentioning

confidence: 99%

Development of experimental methodology on fracture toughness of microscale polymer resins under in situ observation

Kaneko

Sumigawa

et al. 2019

Mat Design & Process Comms

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The purpose of this study is to develop a method on fracture toughness test for single‐digit micrometer scale polymeric materials, including shape design of the specimen and introduction of precrack. Acrylonitrile butadiene styrene (ABS) polymer resin is employed as test material for the development. The specimens are carefully manufactured by means of the focused ion beam (FIB), and a precracks are successfully introduced at the notch root by the asymmetric loading. After then, the specimens are reshaped, and the mode I load is applied for the evaluation of fracture toughness. The stress field around the crack tip is calculated by the finite element analysis, and the critical stress intensity factor KIC is found to be KIC = 0.145 to 0.175 MPa m.

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“…In addition, a large hydrophobic surface area is difficult to mass-produce. Recently, with the development of the micro-molding technique, various tailorable microsurface structures on polymer substrates could be mass-produced 24 .…”

Section: Introductionmentioning

confidence: 99%

A designable surface via the micro-molding process

Wang

et al. 2018

Microsyst Nanoeng

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A rapid prototyping process was presented to fabricate a nylon honeycomb microstructure coated with parylene C. The surface structure was designed to obtain a hydrophobic surface using the volume of fluid (VOF) model. With the micro-molding technique, the contact angle of the polymer surface could be designed and fabricated by changing the different microstructure surface diesteel mold inserts. For the honeycomb (20 μm width and 60 μm depth) microcavity side wall, an average micro-molding filling percentage of 95% could be achieved by using a three-section constant-pressure molding process. The solid surface wettability is governed by both the geometrical microstructures and the surface energy. A 2 μm parylene C layer was deposited on the nylon honeycomb microsurface to reduce the surface energy. To design honeycomb structures with different microcavity densities, the contact angle of these artificial surfaces could change from 91°to 130°. From a comparison of the contact angle measurements with the different models, the honeycomb-structured microsurface could be described by the Cassie-Baxter model. The errors between the VOF simulation and the measured data were o 10%. The drag reduction performance of the honeycomb microplates was investigated in a water tunnel with a high Reynolds number (from 0.5 × 10 6 to 4.6 × 10 6 ). As a result, the honeycomb microplates showed a maximum drag reduction rate of 36 ± 0.6% in comparison with the bare plates in such turbulent flow. Benefiting from the replaceable mold insert, more designable microstructure polymer surfaces can be manufactured by this rapid prototyping technique.

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Review of polymer MEMS micromachining

Cited by 127 publications

References 336 publications

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Development of experimental methodology on fracture toughness of microscale polymer resins under in situ observation

A designable surface via the micro-molding process

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