Transfer-Free CVD Growth of High-Quality Wafer-Scale Graphene at 300 °C for Device Mass Fabrication

Qian, Fengsong; Deng, Jun; Dong, Yibo; Xu, Chen; Hu, Liangchen; Fu, Guosheng; Chang, Pengying; Xie, Yiyang; Sun, Jie

doi:10.1021/acsami.2c16505

Cited by 5 publications

(2 citation statements)

References 49 publications

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“…[42] Recently, Sun et al introduced an innovative approach involving a multi-zone furnace with gradient temperature control, utilizing methane as a precursor. [43] Notably, this methodology achieved wafer-scale graphene film growth at 300 °C, marking a significant advancement in the field. Additional experimental evidence regarding low-temperature CVD growth of graphene is compiled in Table S1 (Supporting Information).…”

Section: Resultsmentioning

confidence: 99%

Bi‐Oriented Step Guided Nucleation and Epitaxy of Twist Bilayer Graphene with Precisely Controlled Twist Angle

Dong,

Gong,

Yang

et al. 2023

Adv Funct Materials

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Twist bilayer graphene (tBLG) with a small magic angle deviated from trivial stacking exhibits fantastic electronic properties. However, the growth of large‐area tBLG with precisely controlled twist angle remains a grand challenge due to the thermodynamically unfavorable nucleation. Here, a bi‐oriented step‐guided strategy is theoretically proposed for the nucleation and epitaxial growth of tBLG, where the twist angle can be predetermined by the orientations of adjacent steps owing to the covalent alignment between the steps and graphene zigzag edges. The presence of bi‐oriented steps can greatly reduce the free energy of the tBLG with matched twist angle, thus promoting the nucleation priority of tBLG. Importantly, it is shown that the 28 sets of bi‐oriented steps with twist angles of 1.5°–30° can be intentionally constructed via two‐step miscutting from bulk crystal of catalytic metals by exploring all potential combinations of bi‐steps on different epitaxial surfaces. The employment of either low‐temperature CVD growth with certain precursors or the high‐melting‐point metal substrates is suggested to against the reconstruction of bi‐oriented steps during growth. This work demonstrates an efficient scheme for the epitaxial growth of large‐area tBLG with pre‐designed twist angle, which can be potentially extended to the growth of other twist 2D materials.

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Section: Resultsmentioning

confidence: 99%

Bi‐Oriented Step Guided Nucleation and Epitaxy of Twist Bilayer Graphene with Precisely Controlled Twist Angle

Dong,

Gong,

Yang

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

show abstract

“…[43,50] Meanwhile, advancements in the techniques used to transfer graphene also aid in the creation of effective and dependable graphene devices. By using cuttingedge heterogeneous integration techniques, such as wafer-scale growth of 2D materials directly onto target substrates, [51,52] the occurrence of surface defects (like the residual aggregates, contamination, wrinkles, and cracks during the transfer process) is circumvented, thereby greatly preventing the scattering losses. In this way, the non-saturable fraction of the graphene absorption can be reduced.…”

Section: Nonlinear Response Of the Ultra-thin Silicon/graphene Hybrid...mentioning

confidence: 99%

High‐Efficiency All‐Optical Modulator Based on Ultra‐Thin Silicon/Graphene Hybrid Waveguides

Cao,

Ding,

Chen

et al. 2023

Advanced Optical Materials

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All‐optical modulation plays a key role in next‐generation optical processing and has attracted enormous attention worldwide. With extraordinary optoelectronic characteristics and friendly integration compatibility with various nanostructures, graphene shows great potential for ultrafast and energy‐efficient all‐optical modulation. Here, high‐efficiency on‐chip all‐optical modulation is experimentally demonstrated based on ultra‐thin silicon/graphene hybrid waveguides, which are complementary‐metal‐oxide‐semiconductor‐compatible and easy to fabricate. Owing to the enhanced light‐graphene interaction enabled by the ultra‐thin silicon photonic platform, the optical nonlinear absorption in graphene is greatly enhanced and a modulation depth of >2 dB is achieved with a saturation threshold of 0.9 pJ per pulse for a 50‐µm‐long modulator. The measured modulation efficiency is as high as 0.052 dB µm−1. Furthermore, the proposed all‐optical modulator has the potential to operate at a bandwidth of hundreds of gigahertz. The present hybrid integration of graphene on ultra‐thin silicon photonic waveguides paves the way toward the applications of on‐chip ultrafast and energy‐efficient all‐optical information processing.

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Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood

et al. 2023

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The detection and analysis of rare cells in complex media such as blood is increasingly important in biomedical research and clinical diagnostics. Micro-Hall detectors (μHD) for magnetic detection in blood have previously demonstrated ultrahigh sensitivity to rare cells. This sensitivity originates from the minimal magnetic background in blood, obviating cumbersome and detrimental sample preparation. However, the translation of this technology to clinical applications has been limited by inherently low throughput (<1 mL/h), susceptibility to clogging, and incompatibility with commercial CMOS foundry processing. To help overcome these challenges, we have developed CMOS-compatible graphene Hall sensors for integration with PDMS microfluidics for magnetic sensing in blood. We demonstrate that these graphene μHDs can match the performance of the best published μHDs, can be passivated for robust use with whole blood, and can be integrated with microfluidics and sensing electronics for in-flow detection of magnetic beads. We show a proof-of-concept validation of our system on a silicon substrate and detect magnetic agarose beads, as a model for cells, demonstrating promise for future integration in clinical applications with a custom CMOS chip.

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Transfer-Free CVD Growth of High-Quality Wafer-Scale Graphene at 300 °C for Device Mass Fabrication

Cited by 5 publications

References 49 publications

Bi‐Oriented Step Guided Nucleation and Epitaxy of Twist Bilayer Graphene with Precisely Controlled Twist Angle

Bi‐Oriented Step Guided Nucleation and Epitaxy of Twist Bilayer Graphene with Precisely Controlled Twist Angle

High‐Efficiency All‐Optical Modulator Based on Ultra‐Thin Silicon/Graphene Hybrid Waveguides

Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood

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