A series of silicone rubber samples with di®erent cyclosiloxanes contents have been successfully prepared, and their hydrophobic recovery behaviors and mechanism were investigated in detail. The gas chromatography-mass spectroscopy technique after Soxhlet extraction was utilized to examine the low molecular weight siloxanes in the sample, SEM was used to observe the surface morphology of the silicone rubber in°uenced by plasma treatment, and contact angle measurement was applied to probe the hydrophobic recovery of the sample surface after plasma treatment at di®erent storage temperatures. The storage time-dependent contact angle of water can be well tted by the di®usion model calculated from Fick's second law. The results imply that the hydrophobic recovery of silicone rubber is related to the di®usion of low molecular weight siloxanes, while larger content or higher temperature can induce faster hydrophobic recovery.