2014
DOI: 10.1109/tmech.2013.2270560
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Tracking of Triangular Reference Signals Using LQG Controllers for Lateral Positioning of an AFM Scanner Stage

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Cited by 45 publications
(30 citation statements)
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“…This compensator is designed to damp the first resonant mode of each of the PTSs. The general form of the vibration compensator and its design procedure is described in [4].…”
Section: Vibration Compensator Designmentioning
confidence: 99%
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“…This compensator is designed to damp the first resonant mode of each of the PTSs. The general form of the vibration compensator and its design procedure is described in [4].…”
Section: Vibration Compensator Designmentioning
confidence: 99%
“…A piezoelectric tube actuator (PTA) is used in AFMs and the advantages of a piezoelectric material (PZM) is that it offers nanometer range motion without backlash, high stiffness, and fast response time [3]. The AFM has limitations in its high speed scanning because of the nature of piezoelectric tube scanners (PTSs) as it involves effects of hysteresis, creep, and vibration at high frequencies [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…In traditional AFM imaging application, a periodic triangular signal is generally applied to its X-axis together with a staircase signal applied to its Y-axis [11]. However, there exist lots of problems in this scanning pattern: oscillations at the turning points will easily lead to system vibration and instability; this pattern is also time costing.…”
Section: Data Preprocessing Proceduresmentioning
confidence: 99%
“…Commonly employed in an atomic force microscope (AFM) [7] as a scanner, a PTS contributes a lot in micro/nano scale imaging and manipulations [8][9][10][11][12]. An AFM in contact constant-force mode works in the following way (see Fig.…”
Section: Introductionmentioning
confidence: 99%
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