Tracking electron-induced carbon contamination and cleaning of Ru surfaces by Auger electron spectroscopy

Abstract

Extreme ultraviolet (EUV) radiation induced growth of carbon and oxygen desorption were investigated on a Ru surface by Auger electron spectroscopy (AES) in the presence and absence of additional photoelectrons (PEs) from a focusing Ru mirror. A decrease in EUV reflectivity with carbon growth in the presence of additional PEs has been observed. Conversely, a carbonaceous Ru surface was cleaned in sequential AES, and discussed in terms of secondary electron assisted dissociation of residual hydrocarbons and water molecules, followed by a chemical reaction between adsorbed carbon and oxygen atoms. V

Nanoscale Ruthenium-Containing Deposits from Ru(CO)4I2via Simultaneous Focused Electron Beam-Induced Deposition and Etching in Ultrahigh Vacuum: Mask Repair in Extreme Ultraviolet Lithography and Beyond

“…Atomic concentrations were determined from the spectra in Figure , considering the AES RSFs derived empirically from standard materials, namely, 0.35 for the O KLL peak at 495 eV and 0.21 for the I MNN peak at 509 eV. For Ru and C, the Ru MNN peak at 231 eV and the C KLL peak at 250 eV were used because these peaks can be best separated from the contributions of other elements. ,, The corresponding RSFs were calculated separately according to the reference sample standards (Figure S3), yielding 0.18 for the C KLL peak at 250 eV and 0.11 for the Ru MNN peak at 231 eV.…”

“…these peaks can be best separated from contributions of other elements. 45,[51][52] The corresponding RSFs were calculated separately according to the reference sample standards 46 (see Supporting Information, Figure S3), yielding 0.18 for the CKLL peak at 250 eV and 0.11 for the RuMNN peak at 231 eV. The FEBID structures produced with electron doses of 1.56 and 3.12 C/cm 2 exhibit compositions with around 60 at.% Ru, 15 at.% I, 15 at.% C and 10 at.% O.…”

“…For Ru and C, the Ru MNN peak at 231 eV and the C KLL peak at 250 eV were used because these peaks can be best separated from the contributions of other elements. 47,53,54 The corresponding RSFs were calculated separately according to the reference sample standards 48 (Figure S3), yielding 0.18 for the C KLL peak at 250 eV and 0.11 for the Ru MNN peak at 231 eV.…”

Primary electron energy dependent flashover in surface polarity on Au films

“…All experiments were performed in the IMPACT facility 19 at the Center for Materials Under Extreme Environments (CMUXE) at Purdue University. The schematic of the experimental setup used for the present study is given in Fig.…”