Traceable multiple sensor system for absolute form measurement

Schulz, Michael; Gerhardt, Joachim; Geckeler, Ralf D.; Elster, Clemens

doi:10.1117/12.614726

Cited by 10 publications

(9 citation statements)

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“…Simulations have shown the error of the topography height with TMS is a linear function of the error of the imaging scale, i.e., a 1% relative error of the imaging scale leads to a 1% relative error of the topography height [7]. For a topography of the order of 10 5 nm, a topography error of 1 nm requires the imaging scale to be known with a relative error of 10 -5 .…”

Section: Effective Sensor Distancementioning

confidence: 98%

“…The system has been named Traceable Multiple Sensor system (TMS) because it is based on distance and angle measurements which are traced back to the SI units of angle and length with high accuracy. With this system the disadvantage of the stitching principle that the quadratic contribution of the topography cannot be determined with high accuracy [3] can be overcome.…”

Section: Introductionmentioning

confidence: 97%

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Scanning form measurement for curved surfaces

Schulz

Geckeler

2005

Advances in Metrology for X-Ray and EUV Optics

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Form measurements with scanning systems are well established. Many scanning systems are limited to almost flat surface forms. In parallel, there is a need for systems capable of measuring stronger curved specimens with a radius of curvature down to one meter or even below. The size of specimen is sometimes up to one meter and the form has to be known with nanometer uncertainty. Moreover, the desired lateral resolution is sometimes smaller than one millimeter.The realization of a form measuring system combining high lateral resolution, a large measurement range and low measurement uncertainty requires sophisticated measurement principles.A measurement principle suitable for this task is presented which uses a combination of multiple distance sensors and an angular sensor, and exemplary measurements for stronger curved surfaces are shown. As multiple distance sensor an interferometer is used. Exemplary measurements are shown and the limitations of the interferometer as multiple distance sensor are discussed.

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Section: Effective Sensor Distancementioning

confidence: 98%

Section: Introductionmentioning

confidence: 97%

Scanning form measurement for curved surfaces

Schulz

Geckeler

2005

Advances in Metrology for X-Ray and EUV Optics

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“…Using an interferometer as multiple sensors, they also developed a new method to eliminate both the straightness error and the yaw error and realize the exact reconstruction with a high lateral resolution [15]. Clemens Elster et al developed a new method [16], [17] which combines a multi-sensor system with a laser collimator to eliminate several errors that have major impacts on the reconstruction results, including straightness error and yaw error of the measurement reference and the zero-adjustment error. And with a high lateral resolution, the method is also free from the data processing error, which means the exact reconstruction can be achieved.…”

Section: Introductionmentioning

confidence: 99%

A Novel Six-Probe Method for the Measurement and Exact Reconstruction of a Pair of Parallel Profiles

Chen

Sun

et al. 2020

IEEE Access

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A novel system and its corresponding method for the measurement and the exact reconstruction of a pair of parallel profiles are designed. There are six sensors installed on the measuring device and they are divided into two groups with different sensor spacings. The exact reconstruction can be realized under the condition of a high lateral resolution, as the straightness error, the yaw error, the zero-adjustment error, and the data processing error can be all eliminated through two scannings and certain data processing method. The measurement error of the displacement sensors can also be suppressed. The new method has the following advantages: (i) the realization of the exact reconstruction, (ii) a high lateral resolution of the reconstruction result which is independent of the sensor spacings, (iii) the skip of the zero calibration before the measurement process, and (iv) the suppression of the sensor random error. These advantages are demonstrated by the theoretical analyses and the simulations. Experiments are also conducted to prove some of these characteristics. INDEX TERMS Data processing error, error elimination, exact reconstruction, high lateral resolution. XI CHEN received the B.S. degree from the School of Precision Instruments and Optoelectronics Engineering, Tianjin University, in 2015, where she is currently pursuing the Ph.D. degree with the State Key Laboratory of Precision Measuring Technology and Instruments. Her current research interests include geometric measurement, optical measurement technology, and industrial on-line measurement.

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“…Besides, the yaw error of the measuring device during scanning also affects the reconstruction result. Therefore, the three-point method [6][7][8], four-point method (or the method using more than four probes) [9,10], the traceable multiple sensor (TMS) method [11], etc. were invented to overcome the influence of the straightness error and eliminate the yaw error at the same time.…”

Section: Introductionmentioning

confidence: 99%

A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

et al. 2019

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To realize the measurement and exact reconstruction of a pair of parallel profiles, a new scanning method using four displacement sensors as probes and different probe spacings has been invented with the advantage of preventing data processing error. The measuring device is placed between the measured objects and moved by a scanning stage to collect measurement data of both measured profiles. Considering many existing methods, the high lateral resolution of the reconstruction result and the rejection of the data processing error cannot always be achieved at the same time. When the measured profiles are in the short wavelength range, data processing errors are often on the same order of magnitude as the height difference of the measured profiles. The new method can eliminate both the straightness error of the measurement reference and the data processing error. The exact reconstruction retaining the high lateral resolution and without data processing error can be realized by rational position arrangement of sensors and corresponding processing method of the measurement data. The new method possesses the following advantages: (i) achievement of the exact reconstruction without data processing error; (ii) high lateral resolution not limited by probe spacing; (iii) concise operation without zero calibration of probes; and (iv) suitability for on-machine measurement. The feasibility and advantages of the new method were demonstrated by theoretical analyses, simulations, and experimental results.

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Traceable multiple sensor system for absolute form measurement

Cited by 10 publications

References 0 publications

Scanning form measurement for curved surfaces

Scanning form measurement for curved surfaces

A Novel Six-Probe Method for the Measurement and Exact Reconstruction of a Pair of Parallel Profiles

A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

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