A Novel Six-Probe Method for the Measurement and Exact Reconstruction of a Pair of Parallel Profiles

Abstract

A novel system and its corresponding method for the measurement and the exact reconstruction of a pair of parallel profiles are designed. There are six sensors installed on the measuring device and they are divided into two groups with different sensor spacings. The exact reconstruction can be realized under the condition of a high lateral resolution, as the straightness error, the yaw error, the zero-adjustment error, and the data processing error can be all eliminated through two scannings and certain data processing method. The measurement error of the displacement sensors can also be suppressed. The new method has the following advantages: (i) the realization of the exact reconstruction, (ii) a high lateral resolution of the reconstruction result which is independent of the sensor spacings, (iii) the skip of the zero calibration before the measurement process, and (iv) the suppression of the sensor random error. These advantages are demonstrated by the theoretical analyses and the simulations. Experiments are also conducted to prove some of these characteristics. INDEX TERMS Data processing error, error elimination, exact reconstruction, high lateral resolution. XI CHEN received the B.S. degree from the School of Precision Instruments and Optoelectronics Engineering, Tianjin University, in 2015, where she is currently pursuing the Ph.D. degree with the State Key Laboratory of Precision Measuring Technology and Instruments. Her current research interests include geometric measurement, optical measurement technology, and industrial on-line measurement.

High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System

“…Zhai et al used the interferometer as a multi-probe, developed a new translational rotation difference method to separate the straightness error, yaw error, and zero-adjustment error, and achieved profile reconstruction with high accuracy and high lateral resolution [19]- [20]. The 4-probe and 6-probe measurement methods proposed by Sun et al [21], [22] can eliminate the straightness error, zero-adjustment error, and yaw error. If the error of the probe itself is ignored, the exact profile reconstruction can be achieved with a higher lateral resolution.…”